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Patent Searching and Data


Title:
METHOD FOR FORMING COATING FILM, APPARATUS FOR FORMING COATING FILM AND COMPUTER-READABLE RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2018/020863
Kind Code:
A1
Abstract:
This method for producing a coating film comprises: a first step for heating a body W to be processed, which comprises a substrate W1 and a projected part W2 provided on the surface of the substrate W1; a second step for obtaining a heated liquid by heating a coating liquid; and a third step for spraying the heated liquid in the form of droplets from a nozzle N onto the surface of the body W to be processed, which has been heated in the first step.

Inventors:
OKAMOTO Yoshiki (1-1 Fukuhara Koshi Cit, Kumamoto 16, 〒8611116, JP)
MIYAMOTO Tetsushi (1-1 Fukuhara Koshi Cit, Kumamoto 16, 〒8611116, JP)
OOMURA Kazuhisa (1-1 Fukuhara Koshi Cit, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2017/021596
Publication Date:
February 01, 2018
Filing Date:
June 12, 2017
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
International Classes:
H01L21/027; B05B7/04; B05B7/16; B05D1/02; B05D3/02
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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