Title:
METHOD FOR FORMING COATING FILM, APPARATUS FOR FORMING COATING FILM AND COMPUTER-READABLE RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2018/020863
Kind Code:
A1
Abstract:
This method for producing a coating film comprises: a first step for heating a body W to be processed, which comprises a substrate W1 and a projected part W2 provided on the surface of the substrate W1; a second step for obtaining a heated liquid by heating a coating liquid; and a third step for spraying the heated liquid in the form of droplets from a nozzle N onto the surface of the body W to be processed, which has been heated in the first step.
Inventors:
OKAMOTO YOSHIKI (JP)
MIYAMOTO TETSUSHI (JP)
OOMURA KAZUHISA (JP)
MIYAMOTO TETSUSHI (JP)
OOMURA KAZUHISA (JP)
Application Number:
PCT/JP2017/021596
Publication Date:
February 01, 2018
Filing Date:
June 12, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/027; B05B7/04; B05B7/16; B05D1/02; B05D3/02
Foreign References:
| JP2003523614A | 2003-08-05 | |||
| JP2015115462A | 2015-06-22 | |||
| JPH06151295A | 1994-05-31 | |||
| JP2005019560A | 2005-01-20 | |||
| JP2006007164A | 2006-01-12 | |||
| JPH07335537A | 1995-12-22 | |||
| JP2016101563A | 2016-06-02 | |||
| JP2010153807A | 2010-07-08 | |||
| JP2011159656A | 2011-08-18 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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