Title:
METHOD FOR FORMING AND DRYING COATING FILM, AND DEVICE FOR FORMING AND DRYING COATING FILM
Document Type and Number:
WIPO Patent Application WO/2015/128979
Kind Code:
A1
Abstract:
A method for forming and drying a coating film, comprising a film liquid discharge step for discharging a film liquid (6) onto a substrate (2) using a coating device, and a coating film drying step for concluding the film liquid discharge step and drying a coating film (7) having fluid properties formed on the substrate (2), wherein an inkjet coating device (1) is used as the coating device in the film liquid discharge step, and the coating film (7) having fluid properties formed on the substrate (2) as a result of discharge of the film liquid (6) by the inkjet coating device (1) is vacuum dried in an atmosphere having a temperature of 10°C to 40°C in the coating film drying step.
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Inventors:
KOZAWA YASUHIRO (JP)
Application Number:
PCT/JP2014/054816
Publication Date:
September 03, 2015
Filing Date:
February 27, 2014
Export Citation:
Assignee:
ISHII HYOKI KK (JP)
International Classes:
B05D1/26; B05C5/00; B05C9/12; B05D3/12; H01L21/027
Foreign References:
| JP2006281189A | 2006-10-19 | |||
| JP2006068598A | 2006-03-16 | |||
| JP2012066222A | 2012-04-05 | |||
| JP2002371196A | 2002-12-26 |
Attorney, Agent or Firm:
SHIROMURA Kunihiko et al. (JP)
Kunihiko Shiromura (JP)
Kunihiko Shiromura (JP)
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