Title:
METHOD FOR FORMING FILTER SCREEN ON MEMS SENSOR, AND MEMS SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/094905
Kind Code:
A1
Abstract:
Provided are a method for forming a filter screen on an MEMS sensor, and an MEMS sensor. The method comprises the following steps: providing, at a substrate (13), an adhesive tape (12) capable of separation, and forming a filter screen (11) at an adhesive surface of the adhesive tape (12) capable of separation; transferring the filter screen (11) to a thin film (14) to form a self-adhesive roll material (15); and transferring and adhering the filter screen (11) at the self-adhesive roll material (15) to a collection hole (16) of an MEMS sensor. The filter screen (11) formed by the above method has small screen openings arranged closely and uniformly. The above method enables a high yield, and is applicable to mass production.
Inventors:
ZHAN JUNKAI (CN)
ZHOU ZONGLIN (CN)
QIU GUANXUN (CN)
CAI MENGJIN (CN)
ZHOU ZONGLIN (CN)
QIU GUANXUN (CN)
CAI MENGJIN (CN)
Application Number:
PCT/CN2017/075595
Publication Date:
May 31, 2018
Filing Date:
March 03, 2017
Export Citation:
Assignee:
GOERTEK INC (CN)
International Classes:
H04R1/02; B81B7/00; B81C3/00
Foreign References:
| CN202957950U | 2013-05-29 | |||
| JP2004349416A | 2004-12-09 | |||
| US20140002964A1 | 2014-01-02 | |||
| CN106044698A | 2016-10-26 |
Attorney, Agent or Firm:
BEYOND TALENT PATENT AGENT FIRM (CN)
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