Title:
METHOD FOR FORMING MAGNESIUM OXIDE THIN FILM AND PROCESSED PLATE
Document Type and Number:
WIPO Patent Application WO/2013/035360
Kind Code:
A1
Abstract:
A method for depositing a magnesium oxide thin film on a substrate by a laser ablation method using a sintered body or single crystal of magnesium oxide as a target. In this method, a flat processed film, which is composed of magnesium oxide having the (111) plane as a surface, is formed by directly depositing and epitaxially growing a film on the main surface of a substrate that is composed of strontium titanate having the (111) plane as the main surface or yttria-stabilized zirconia having the (111) plane as the main surface.
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Inventors:
SUSAKI TOMOFUMI (JP)
HOSONO HIDEO (JP)
FUJIHASHI TADAHIRO (JP)
TODA YOSHITAKE (JP)
HOSONO HIDEO (JP)
FUJIHASHI TADAHIRO (JP)
TODA YOSHITAKE (JP)
Application Number:
PCT/JP2012/056191
Publication Date:
March 14, 2013
Filing Date:
March 09, 2012
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
SUSAKI TOMOFUMI (JP)
HOSONO HIDEO (JP)
FUJIHASHI TADAHIRO (JP)
TODA YOSHITAKE (JP)
SUSAKI TOMOFUMI (JP)
HOSONO HIDEO (JP)
FUJIHASHI TADAHIRO (JP)
TODA YOSHITAKE (JP)
International Classes:
C30B29/16; B01D53/02; B01D53/04; B01J20/04; B01J20/34; B01J21/10; C01B32/50; C23C14/08
Other References:
TADAHIRO FUJIHASHI ET AL.: "C02 o Probe to shita MgO/Nb:SrTiO3(111) Hyomen Tokusei no Kansatsu", EXTENDED ABSTRACTS, vol. 58, 24 March 2011 (2011-03-24), pages 24P-BC-2, XP008174038
TOMOFUMI SUSAKI: "Cho Koshika ni yoru Wide Gap Sankabutsu no Kino Kaihatsu", ANNUAL REPORT OF THE MURATA SCIENCE FOUNDATION, 2009, pages 304 - 306, XP008174564
T. SUSAKI ET AL.: "Tunable work function in MgO/Nb:SrTi03 surfaces studied by Kelvin probe technique", PHYSICAL REVIEW B, vol. 83, no. 11, 16 March 2011 (2011-03-16), pages 115435 - 1-115435-5, XP055147665
K. MATSUZAKI ET AL.: "Layer-by-layer epitaxial growth of polar MgO(lll) thin films", PHYSICAL REVIEW B, vol. 82, no. 3, 16 July 2010 (2010-07-16), pages 033408 - 1 - 033408-4, XP055147660
X. W. LI; A. GUPTA; GANG XIAO; W. QIAN; V P. DRAVID, APPL. PHYS. LETT., vol. 73, 1998, pages 3282
S. D. YOON; S. A. OLIVER; C. VITTORIA, J. APPL. PHYS., vol. 91, 2002, pages 7379
M. NODA; T. YAMADA; K. SEKI; T. KAMO; K. YAMASHITA; H. FUNAKUBO; M. OKUYAMA, IEEE TRANS. ON UFFC, vol. 57, no. 10, 2010, pages 2221 - 2227
K. MATSUZAKI; H.HOSONO; T.SUSAKI: "Layer-by-layer epitaxial growth of polar MgO(111) thin films", PHYSICAL REVIEW B, vol. 82, no. 3, July 2010 (2010-07-01), pages 033408, XP055147660, DOI: doi:10.1103/PhysRevB.82.033408
TOMOFUMI SUSAKI: "Cho Koshika ni yoru Wide Gap Sankabutsu no Kino Kaihatsu", ANNUAL REPORT OF THE MURATA SCIENCE FOUNDATION, 2009, pages 304 - 306, XP008174564
T. SUSAKI ET AL.: "Tunable work function in MgO/Nb:SrTi03 surfaces studied by Kelvin probe technique", PHYSICAL REVIEW B, vol. 83, no. 11, 16 March 2011 (2011-03-16), pages 115435 - 1-115435-5, XP055147665
K. MATSUZAKI ET AL.: "Layer-by-layer epitaxial growth of polar MgO(lll) thin films", PHYSICAL REVIEW B, vol. 82, no. 3, 16 July 2010 (2010-07-16), pages 033408 - 1 - 033408-4, XP055147660
X. W. LI; A. GUPTA; GANG XIAO; W. QIAN; V P. DRAVID, APPL. PHYS. LETT., vol. 73, 1998, pages 3282
S. D. YOON; S. A. OLIVER; C. VITTORIA, J. APPL. PHYS., vol. 91, 2002, pages 7379
M. NODA; T. YAMADA; K. SEKI; T. KAMO; K. YAMASHITA; H. FUNAKUBO; M. OKUYAMA, IEEE TRANS. ON UFFC, vol. 57, no. 10, 2010, pages 2221 - 2227
K. MATSUZAKI; H.HOSONO; T.SUSAKI: "Layer-by-layer epitaxial growth of polar MgO(111) thin films", PHYSICAL REVIEW B, vol. 82, no. 3, July 2010 (2010-07-01), pages 033408, XP055147660, DOI: doi:10.1103/PhysRevB.82.033408
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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