Title:
METHOD FOR FORMING MAGNETORESISTANCE EFFECT FILM
Document Type and Number:
WIPO Patent Application WO/2000/065614
Kind Code:
A1
Abstract:
A method for forming a magnetoresistance effect film, enabling manufacture of a magnetoresistive device having a high MR ratio by improving the flatness of the interfaces between layers without deteriorating the crystallinity of a multilayer film. The method for forming a magnetoresistance effect film including a free magnetization layer, a nonmagnetic layer, a fixed magnetization layer, and an antiferromagnetic layer on a predetermined substrate in order of mention or in the reverse order is characterized by comprising at least the step of disposing the substrate in a film-forming chamber, lowering the ultimate degree of vacuum in the film-forming chamber below 10?-10¿ Torr, introducing at least an oxygen-containing gas (a) into the film-forming chamber, changing the degree of vacuum in the film-forming chamber to a constant pressure in a range from 3x10?-9¿ Torr to 1x10?-8¿ Torr, introducing a gas (b) consisting of Ar, and sputtering a predetermined target using a mixture of the gases (a, b), so as to form the free magnetization layer under the nonmagnetic layer or forming both the fixed magnetization layer and the nonmagnetic layer.
More Like This:
| WO/2002/009158 | SEMICONDUCTOR STRUCTURE INCLUDING A MAGNETIC TUNNEL JUNCTION |
| WO/2003/021579 | MAGNETIC MATERIAL STRUCTURES, DEVICES AND METHODS |
| JPH09232142 | MAGNETIC DEVICE AND MANUFACTURE THEREOF |
Inventors:
TAKAHASHI MIGAKU (JP)
UNEYAMA KAZUHIRO (JP)
YAGAMI KOUJIROU (JP)
TSUNODA MASAKIYO (JP)
UNEYAMA KAZUHIRO (JP)
YAGAMI KOUJIROU (JP)
TSUNODA MASAKIYO (JP)
Application Number:
PCT/JP1999/002148
Publication Date:
November 02, 2000
Filing Date:
April 22, 1999
Export Citation:
Assignee:
TAKAHASHI MIGAKU (JP)
UNEYAMA KAZUHIRO (JP)
YAGAMI KOUJIROU (JP)
TSUNODA MASAKIYO (JP)
UNEYAMA KAZUHIRO (JP)
YAGAMI KOUJIROU (JP)
TSUNODA MASAKIYO (JP)
International Classes:
H01F10/32; H01F41/30; H01L43/12; (IPC1-7): H01F41/18
Foreign References:
| JPH10270776A | 1998-10-09 |
Attorney, Agent or Firm:
Fukumori, Hisao (Kudanminami 4-chome Chiyoda-ku Tokyo, JP)
Download PDF: