Title:
METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM AND APPARATUS FOR FORMING METAL OXIDE FILM
Document Type and Number:
WIPO Patent Application WO/2011/027425
Kind Code:
A1
Abstract:
A method for forming a metal oxide film, which can further improve the production efficiency while maintaining low resistivity of a metal oxide film formed thereby. The method for forming a metal oxide film comprises the following steps: a step wherein a solution (4) containing a metal element and ethylenediamine (4a) is formed into a mist; a step wherein a substrate (2) is heated; and a step wherein the mist of the solution (4) obtained in the above-mentioned step is supplied to a first major surface of the substrate (2) which has been heated in the above-mentioned heating step.
Inventors:
ORITA HIROYUKI (JP)
SHIRAHATA TAKAHIRO (JP)
YOSHIDA AKIO (JP)
FUJITA SHIZUO (JP)
KAMEYAMA NAOKI (JP)
KAWAHARAMURA TOSHIYUKI (JP)
SHIRAHATA TAKAHIRO (JP)
YOSHIDA AKIO (JP)
FUJITA SHIZUO (JP)
KAMEYAMA NAOKI (JP)
KAWAHARAMURA TOSHIYUKI (JP)
Application Number:
PCT/JP2009/065314
Publication Date:
March 10, 2011
Filing Date:
September 02, 2009
Export Citation:
Assignee:
TOSHIBA MITSUBISHI ELEC INC (JP)
UNIV KYOTO (JP)
ORITA HIROYUKI (JP)
SHIRAHATA TAKAHIRO (JP)
YOSHIDA AKIO (JP)
FUJITA SHIZUO (JP)
KAMEYAMA NAOKI (JP)
KAWAHARAMURA TOSHIYUKI (JP)
UNIV KYOTO (JP)
ORITA HIROYUKI (JP)
SHIRAHATA TAKAHIRO (JP)
YOSHIDA AKIO (JP)
FUJITA SHIZUO (JP)
KAMEYAMA NAOKI (JP)
KAWAHARAMURA TOSHIYUKI (JP)
International Classes:
C23C18/12; B05D3/02; H01L21/288
Foreign References:
| JP2005264230A | 2005-09-29 | |||
| JPS6039171A | 1985-02-28 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
Hidetoshi Yoshitake (JP)
Hidetoshi Yoshitake (JP)
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