Title:
METHOD FOR FORMING NANOWIRE BY CONTROLLING SHAPE OF METAL CATALYST
Document Type and Number:
WIPO Patent Application WO/2017/209460
Kind Code:
A1
Abstract:
The present invention relates to a method for forming a nanowire and, more specifically, to a method for forming a nanowire the position and diameter of which can be adjusted by controlling the shape of a metal catalyst. The method for forming a nanowire according to an embodiment of the present invention comprises: a step of forming an a few nanometers-thick oxide film on a substrate; a step of forming a photoresist pattern on the oxide film; a step of evaporating a metal catalyst over the photoresist pattern; a step of forming a metal catalyst pattern on the oxide film by removing the photoresist pattern along with the metal catalyst evaporated on the photoresist; a step of forming a metal nanoparticle pattern by heat-treating the metal catalyst pattern; a step of removing the oxide film formed between the metal nanoparticle pattern and the substrate; and a step of growing a nanowire in the area in which the metal nanoparticle pattern is formed.
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Inventors:
LEE JIN SEOK (KR)
PARK YI-SEUL (KR)
PARK YI-SEUL (KR)
Application Number:
PCT/KR2017/005545
Publication Date:
December 07, 2017
Filing Date:
May 26, 2017
Export Citation:
Assignee:
SOOKMYUNG WOMEN'S UNIV INDUSTRY ACADEMIC COOPERATION FOUNDATION (KR)
International Classes:
H01L29/41; H01L21/02; H01L21/027; H01L21/324; H01L29/06
Foreign References:
| KR101468369B1 | 2014-12-11 | |||
| KR100699948B1 | 2007-03-26 | |||
| KR101150446B1 | 2012-06-01 | |||
| KR101530379B1 | 2015-06-22 | |||
| US6623893B1 | 2003-09-23 |
Attorney, Agent or Firm:
YOO, Jong Woo (KR)
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