Title:
METHOD FOR FORMING OXIDE FILM
Document Type and Number:
WIPO Patent Application WO/1993/004210
Kind Code:
A1
Abstract:
Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressures in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultraviolet rays on gases introduced to at least one of the vessels.
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Inventors:
Ohmi, Tadahiro (Komegabukuro 2-chome, Aoba-ku Sendai-shi, Miyagi-ken 980, 1-17-301, JP)
Imaoka, Takashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shimada, Hisayuki (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Konishi, Nobuhiro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Morita, Mizuho (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Yamashita, Takeo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shibata, Tadashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Wakamatsu, Hidetoshi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Watanabe, Jinzo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Aoyama, Shintaro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Nakamura, Masakazu (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Imaoka, Takashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shimada, Hisayuki (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Konishi, Nobuhiro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Morita, Mizuho (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Yamashita, Takeo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shibata, Tadashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Wakamatsu, Hidetoshi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Watanabe, Jinzo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Aoyama, Shintaro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Nakamura, Masakazu (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Application Number:
PCT/JP1992/001048
Publication Date:
March 04, 1993
Filing Date:
August 19, 1992
Export Citation:
Assignee:
Ohmi, Tadahiro (Komegabukuro 2-chome, Aoba-ku Sendai-shi, Miyagi-ken 980, 1-17-301, JP)
Imaoka, Takashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shimada, Hisayuki (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Konishi, Nobuhiro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Morita, Mizuho (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Yamashita, Takeo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shibata, Tadashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Wakamatsu, Hidetoshi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Watanabe, Jinzo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Aoyama, Shintaro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Nakamura, Masakazu (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Imaoka, Takashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shimada, Hisayuki (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Konishi, Nobuhiro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Morita, Mizuho (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Yamashita, Takeo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Shibata, Tadashi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Wakamatsu, Hidetoshi (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Watanabe, Jinzo (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Aoyama, Shintaro (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
Nakamura, Masakazu (Department of Electronics Faculty of Engineering Tohoku University, Aza-Aoba Aramaki, Aoba-k, Sendai-shi Miyagi-ken 980, JP)
International Classes:
C23C8/10; C23C8/36; C23C14/02; C23C14/48; C23C14/56; C23C16/02; C23C16/44; C30B23/02; C30B25/02; H01L21/306; H01L21/316; H01L21/314; (IPC1-7): C23C8/10; C23C16/48; G01B21/30; G01N23/227; G21K5/00; H01L21/027; H01L21/263; H01L21/265; H01L21/304; H01L21/68
Attorney, Agent or Firm:
Fukumori, Hisao (12 Honshio-cho, Shinjuku-ku, Tokyo 160, JP)
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