METHOD FOR FORMING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT AND APPARATUS FOR PRODUCING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT

Title:

METHOD FOR FORMING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT AND APPARATUS FOR PRODUCING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT

Document Type and Number:

WIPO Patent Application WO/2016/117359

Kind Code:

A1

Abstract:

Provided is a method for forming a perpendicular magnetization type magnetic tunnel junction element. This method comprises: a step for forming a tunnel barrier layer on a first magnetic layer of a body to be processed; a step for cooling the body to be processed, on which the tunnel barrier layer has been formed; and a step for forming a second magnetic layer on the tunnel barrier layer after the cooling step.

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Inventors:

KITADA TORU (JP)
NAKAMURA KANTO (JP)
GOMI ATSUSHI (JP)
FURUKAWA SHINJI (JP)
SUZUKI YUSUKE (US)

Application Number:

PCT/JP2016/050265

Publication Date:

July 28, 2016

Filing Date:

January 06, 2016

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)

International Classes:

H01L43/12; C23C14/58; H01F10/16; H01F10/26; H01F41/18; H01L21/8246; H01L27/105; H01L43/08; H01L43/10

Domestic Patent References:

WO2011081203A1	2011-07-07
WO2015072140A1	2015-05-21
WO2015072139A1	2015-05-21

Foreign References:

JP2013251416A	2013-12-12
JP2009081315A	2009-04-16
JP2011054238A	2011-03-17
JP2006286669A	2006-10-19

Attorney, Agent or Firm:

HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)

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