Title:
METHOD FOR FORMING QUARTZ GLASS
Document Type and Number:
WIPO Patent Application WO/2006/003912
Kind Code:
A1
Abstract:
A method for forming a quartz glass, which comprises: a first step of holding a quartz glass having an OH group concentration of 900 to 1300 ppm on the mass basis in a cavity of a mold having a section for pressuring, a second step of heating the above quarts glass so as for the quartz glass to be held at a holding temperature in the range of 1530 to 1630&ring C and then pressuring the resultant hot quartz glass by the above pressuring section so as for the cavity to have a maximum pressure of 0.2 to 0.8 kg/cm2, to thereby form the quartz glass into an article having a prescribed shape, and a third step of cooling the formed quartz glass.
Inventors:
ABE TETSUYA (JP)
YAJIMA SHOUJI (JP)
YAJIMA SHOUJI (JP)
Application Number:
PCT/JP2005/011909
Publication Date:
January 12, 2006
Filing Date:
June 29, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
ABE TETSUYA (JP)
YAJIMA SHOUJI (JP)
ABE TETSUYA (JP)
YAJIMA SHOUJI (JP)
International Classes:
C03B11/00; C03B20/00; G03F1/60; H01L21/027; (IPC1-7): C03B20/00; C03B11/00
Foreign References:
| JP2000219523A | 2000-08-08 | |||
| JPH0274331U | 1990-06-06 | |||
| JPH08151220A | 1996-06-11 | |||
| JP2004307264A | 2004-11-04 |
Other References:
See also references of EP 1783103A4
None
None
Attorney, Agent or Firm:
Nagahama, Noriaki (Muraki Bldg. 8th Floor 2-10-10, Yaes, Chuo-ku Tokyo 28, JP)
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