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Title:
METHOD FRO DETERMINING ANGLE OF PROBE, HIGH-FREQUENCY CHARACTERISTIC INSPECTING DEVICE, PROGRAM AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2019/050001
Kind Code:
A1
Abstract:
This method includes, while varying a probe angle relative to a flat electrical conductor surface of a substrate which includes said electrical conductor surface and which is placed on a placement surface of a stage of a high-frequency characteristic inspecting device, to thereby vary a state of contact between a tip end of a signal terminal and a tip end of a ground terminal on the one hand and the electrical conductor surface on the other hand: at different probe angles, obtaining an S parameter by outputting a high-frequency signal from the signal terminal to the electrical conductor surface and receiving a reflected signal using the probe; and, on the basis of a plurality of S parameters, determining a reference probe angle at which the electrical conductor surface is parallel to a reference line formed by joining the tip end of the signal terminal and the tip end of the ground terminal.

Inventors:
SAKAMAKI, Ryo (Tsukuba Central 1 1-1, Umezono 1-chome, Tsukuba-sh, Ibaraki 60, 〒3058560, JP)
HORIBE, Masahiro (Tsukuba Central 1 1-1, Umezono 1-chome, Tsukuba-sh, Ibaraki 60, 〒3058560, JP)
Application Number:
JP2018/033254
Publication Date:
March 14, 2019
Filing Date:
September 07, 2018
Export Citation:
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Assignee:
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY (3-1 Kasumigaseki 1-chome, Chiyoda-ku Tokyo, 21, 〒1008921, JP)
International Classes:
G01R31/28; G01R27/06; G01R31/26; G01R35/00
Domestic Patent References:
WO2017203876A12017-11-30
Foreign References:
JP2000232143A2000-08-22
JPH10116863A1998-05-06
US8933707B12015-01-13
JPH0351777A1991-03-06
JP2011196813A2011-10-06
US20130015870A12013-01-17
Other References:
February 2010 (2010-02-01), Retrieved from the Internet [retrieved on 20170613]
SAKAMAKI, RYO ET AL.: "Proposal of a Precision Probe-Tilt Adjustment with the RF Signal Detection Technique", 2018 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2018, 11 July 2018 (2018-07-11), XP033424191
Attorney, Agent or Firm:
AOKI, Atsushi et al. (SEIWA PATENT & LAW, Toranomon 37 Mori Bldg. 5-1, Toranomon 3-chome, Minato-k, Tokyo 23, 〒1058423, JP)
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