Title:
METHOD FOR GAP ADJUSTMENT OF TWO MECHANICAL ELEMENTS OF A SUBSTANTIALLY PLANAR MICRO-MECHANICAL STRUCTURE AND CORRESPONDING ELECTROMECHANICAL RESONATOR
Document Type and Number:
WIPO Patent Application WO2003043189
Kind Code:
A3
Abstract:
The invention concerns a method for adjusting the operating gap of two mechanical elements of a substantially planar mechanical structure obtained by micro-etching. The method consists in attributing (A) to one of the elements (E) a fixed reference position (RF) in the direction of the residual gap separating said elements; connecting (C) the other element (OE) to the fixed reference position (RF) by an elastic link (S) and installing (D) between the fixed reference position (RF) and the other element (OE) at least a stop block defining an abutting gap, maximum displacement amplitude of the other element; subjecting (DE) the other element (OE) to a displacement antagonistic to the elastic link (S) up to the abutting position constituting the operating position, the residual gap being reduced to the difference between residual gap and abutting gap and less than the resolution of the micro-etching process. The invention is applicable to electromechanical resonators.
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Inventors:
KAISER ANDREAS (FR)
GALAYKO DIMITRI YURIEVITCH (FR)
COLLARD DOMINIQUE JULES VICTOR (FR)
GALAYKO DIMITRI YURIEVITCH (FR)
COLLARD DOMINIQUE JULES VICTOR (FR)
Application Number:
PCT/FR2002/003902
Publication Date:
December 11, 2003
Filing Date:
November 14, 2002
Export Citation:
Assignee:
CENTRE NAT RECH SCIENT (FR)
KAISER ANDREAS (FR)
GALAYKO DIMITRI YURIEVITCH (FR)
COLLARD DOMINIQUE JULES VICTOR (FR)
KAISER ANDREAS (FR)
GALAYKO DIMITRI YURIEVITCH (FR)
COLLARD DOMINIQUE JULES VICTOR (FR)
International Classes:
B81C99/00; B81B3/00; H03H3/007; H03H9/02; H03H9/24; (IPC1-7): H03H9/02
Foreign References:
| US6236281B1 | 2001-05-22 |
Other References:
HIRANO T ET AL: "Operation of sub-micron gap electrostatic comb-drive actuators", TRANSDUCERS. SAN FRANCISCO, JUNE 24 - 27, 1991, PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS ANDACTUATORS, NEW YORK, IEEE, US, vol. CONF. 6, 24 June 1991 (1991-06-24), pages 873 - 876, XP010037297, ISBN: 0-87942-585-7
TOSHIKI HIRANO ET AL: "DESIGN, FABRICATION, AND OPERATION OF SUBMICRON GAP COMB-DRIVE MICROACTUATORS", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 1, no. 1, 1 March 1992 (1992-03-01), pages 52 - 59, XP000304102, ISSN: 1057-7157
WAN-THAI HSU ET AL: "A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators", PROCEEDINGS OF THE IEEE 14TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS. MEMS 2001. INTERLAKEN, SWITZERLAND, JAN. 21 - 25, 2001, IEEE INTERNATIONAL MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE, NEW YORK, NY: IEEE, US, vol. CONF. 14, 21 January 2001 (2001-01-21), pages 349 - 352, XP010534622, ISBN: 0-7803-5998-4
TOSHIKI HIRANO ET AL: "DESIGN, FABRICATION, AND OPERATION OF SUBMICRON GAP COMB-DRIVE MICROACTUATORS", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 1, no. 1, 1 March 1992 (1992-03-01), pages 52 - 59, XP000304102, ISSN: 1057-7157
WAN-THAI HSU ET AL: "A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators", PROCEEDINGS OF THE IEEE 14TH. ANNUAL INTERNATIONAL CONFERENCE ON MICROELECTRO MECHANICAL SYSTEMS. MEMS 2001. INTERLAKEN, SWITZERLAND, JAN. 21 - 25, 2001, IEEE INTERNATIONAL MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE, NEW YORK, NY: IEEE, US, vol. CONF. 14, 21 January 2001 (2001-01-21), pages 349 - 352, XP010534622, ISBN: 0-7803-5998-4
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