Title:
METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND DEVICE FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Document Type and Number:
WIPO Patent Application WO/2014/042003
Kind Code:
A1
Abstract:
This device for generating extreme ultraviolet light may comprise: a chamber provided with a through-hole; an introducing optical system configured so as to introduce a pulse laser beam into a first predetermined area inside the chamber by way of the through-hole; a target supply part configured so as to output a target toward the first predetermined area; a light source configured so that light is irradiated into a second predetermined area that includes a portion of the trajectory of the target between the target supply part and the first predetermined area, the cross section of the optical path in a second predetermined area being greater in length in the vertical direction with respect to the movement direction of the target, than in the movement direction of the target; and an optical sensor configured so as to detect light incident from the second predetermined area to thereby detect a target that passes through the second predetermined area.
Inventors:
MORIYA MASATO (JP)
HAYASHI HIDEYUKI (JP)
WAKABAYASHI OSAMU (JP)
HAYASHI HIDEYUKI (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2013/072872
Publication Date:
March 20, 2014
Filing Date:
August 27, 2013
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00; G03F7/20; H01L21/027
Foreign References:
| JP2012175006A | 2012-09-10 | |||
| JP2011003887A | 2011-01-06 | |||
| JP2008532228A | 2008-08-14 | |||
| JP2011014913A | 2011-01-20 |
Attorney, Agent or Firm:
UTSUNOMIYA Masaaki et al. (JP)
Masaaki Utsunomiya (JP)
Masaaki Utsunomiya (JP)
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