Title:
METHOD FOR GENERATING PLASMA ACTIVE SPECIES BY USING PULSE TYPE POWER
Document Type and Number:
WIPO Patent Application WO/2021/049884
Kind Code:
A1
Abstract:
The present invention relates to a method for generating plasma active species by using pulse type power, the method maximizing, through adjustment of pulse driving conditions, the contribution of a rapid light emission increase that occurs when power is applied and a rapid afterglow increase that occurs when power is cut off, so that the generation of active species is maximized. According to the method for generating plasma active species by using pulse type power, of the present invention, the power efficiency for the generation of the plasma active species can be increased by only a change in power driving conditions without adding or changing an electrode.
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Inventors:
YUN GUN SU (KR)
JEONG SEOK YONG (KR)
LEE MIN UK (KR)
LEE JAE KOO (KR)
NAM WOO JIN (KR)
JEONG SEOK YONG (KR)
LEE MIN UK (KR)
LEE JAE KOO (KR)
NAM WOO JIN (KR)
Application Number:
PCT/KR2020/012210
Publication Date:
March 18, 2021
Filing Date:
September 10, 2020
Export Citation:
Assignee:
POSTECH RES & BUSINESS DEV FOUND (KR)
International Classes:
H05H1/46; H01J37/32
Foreign References:
| KR101183140B1 | 2012-09-14 | |||
| KR101826642B1 | 2018-02-07 | |||
| US20170243727A1 | 2017-08-24 | |||
| KR20160105272A | 2016-09-06 |
Other References:
LEE MIN UK, LEE JAE KOO, YUN GUNSU S.: "Generation of energetic electrons in pulsed microwave plasmas", PLASMA PROCESSES AND POLYMERS, WILEY - VCH VERLAG, DE, vol. 15, no. 1, 1 January 2018 (2018-01-01), DE, pages 1700124, XP055791448, ISSN: 1612-8850, DOI: 10.1002/ppap.201700124
Attorney, Agent or Firm:
LEE, Cheol Hee (KR)
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