Title:
METHOD FOR GENERATING REFERENCE STATUS DATA FOR MONITORING STATUS OF CHAMBER, METHOD FOR MONITORING STATUS OF CHAMBER, AND APPARATUS FOR MONITORING STATUS OF CHAMBER
Document Type and Number:
WIPO Patent Application WO/2023/214804
Kind Code:
A1
Abstract:
The present application relates to a method for monitoring the status of a chamber. A method for monitoring the status of a chamber according to one embodiment comprises the steps of: obtaining a reference status data set reflecting the status of the chamber; transmitting radio waves in a specific frequency range into the chamber that is being monitored, and receiving radio waves reflected inside the chamber; using the received radio waves to generate current status data of the chamber being monitored; using the reference status data set and the current status data to generate monitoring information about the current status of the chamber being monitored; and providing the monitoring information.
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Inventors:
KIM JAEHYUN (KR)
SEO SANG HUN (KR)
LEE JEONG BEOM (KR)
LEE SANG WON (KR)
SEO SEUNGHUN (KR)
SONG MYUNG GON (KR)
SEO SANG HUN (KR)
LEE JEONG BEOM (KR)
LEE SANG WON (KR)
SEO SEUNGHUN (KR)
SONG MYUNG GON (KR)
Application Number:
PCT/KR2023/006061
Publication Date:
November 09, 2023
Filing Date:
May 03, 2023
Export Citation:
Assignee:
AETHER INC (KR)
International Classes:
H01L21/67; H01J37/32; H01L21/66
Foreign References:
| KR20210129122A | 2021-10-27 | |||
| KR100402202B1 | 2003-12-24 | |||
| KR20210147677A | 2021-12-07 | |||
| KR20050013598A | 2005-02-04 | |||
| KR102487639B1 | 2023-01-11 |
Attorney, Agent or Firm:
IPLAY PATENT LAW FIRM (KR)
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