Title:
METHOD OF HEAT TREATMENT AND HEAT TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/063841
Kind Code:
A1
Abstract:
A method of heat treatment including the mounting step of mounting a treatment
object on a mounting table provided in a treating vessel constructed so as to allow
evacuation of internal atmosphere and the heat treatment step of, after the mounting
step, heating the treatment object to given set temperature and maintaining
the temperature by heating means operated by electric power supply and simultaneously
realizing given gas stream within the treating vessel to thereby achieve given
heat treatment of the treatment object, characterized in that immediately before
the heat treatment step, the short-time large power supply operation such that
power greater than the power fed to the heating means during the temperature maintenance
of the treatment object in the heat treatment step is fed to the heating means only
for a short period of time is carried out at least once.
Inventors:
AIBA YASUSHI (JP)
Application Number:
PCT/JP2006/323704
Publication Date:
June 07, 2007
Filing Date:
November 28, 2006
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
AIBA YASUSHI (JP)
AIBA YASUSHI (JP)
International Classes:
C23C16/44; C23C16/52; H01L21/205; H01L21/285
Foreign References:
| JP2004096060A | 2004-03-25 | |||
| JPH11168068A | 1999-06-22 | |||
| JPH10144619A | 1998-05-29 | |||
| JP2004273991A | 2004-09-30 | |||
| JP2000235886A | 2000-08-29 | |||
| JP2002327274A | 2002-11-15 | |||
| JP2003051453A | 2003-02-21 |
Attorney, Agent or Firm:
YOSHITAKE, Kenji et al. (Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, JP)
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