Title:
METHOD FOR HEATING ULTRA-PURE WATER
Document Type and Number:
WIPO Patent Application WO/2019/171632
Kind Code:
A1
Abstract:
Secondary pure water from a sub system 4 is heated by a heat exchanger 6, a heat exchanger 10, and a heat exchanger 12 and is sent to a use point. The heat source of the heat exchanger 6 is warm ultra-pure water returned from the use point. Medium water heated by a heater 40 is circulated in the heat exchanger 10. A pump 46 for circulating medium water is subjected to inverter control, and a bypass flow rate is controlled by a three-way valve 43, in accordance with the amount of ultra-pure water used at the use point.
Inventors:
HORII SHIGEKI (JP)
Application Number:
PCT/JP2018/033812
Publication Date:
September 12, 2019
Filing Date:
September 12, 2018
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
C02F1/00; F24H1/00
Foreign References:
JP6149993B1 | 2017-06-21 | |||
JP6149992B1 | 2017-06-21 | |||
JP2013119060A | 2013-06-17 | |||
JP2013204956A | 2013-10-07 | |||
JP2012127633A | 2012-07-05 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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