Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR IMPRINT LITHOGRAPHY AT CONSTANT TEMPERATURE
Document Type and Number:
WIPO Patent Application WO2005109095
Kind Code:
A3
Abstract:
Method for transferring a pattern from a template (10) having a structured surface (11) to a substrate (12) carrying a surface layer (14) of a material devised to 5 solidify upon exposure to radiation, comprising: arranging said template and substrate mutually parallel in an imprint apparatus, with said structured surface facing said surface layer; heating the template and the substrate to a temperature Tp by means of a heater device (20); and while maintaining said temperature Tp, performing the steps of: pressing the template towards the substrate for imprinting said pattern into said layer; exposing said layer to radiation (19) for solidifying the layer, and - postbaking the layer.

Inventors:
BECK MARC (SE)
HEIDARI BABAK (SE)
BOLMSJOE ERIK (SE)
THEANDER ERIK (SE)
Application Number:
EP2004053106W
Publication Date:
August 10, 2006
Filing Date:
November 25, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
OBDUCAT AB
BECK, MARC
HEIDARI, BABAK
BOLMSJOE, ERIK
THEANDER, ERIK
International Classes:
G03F7/00; B29C43/02; B29C43/10; B81C99/00; G03F1/00; G03F7/20; H01L21/00
Foreign References:
US6190929B12001-02-20
Other References:
RESNICK D J ET AL: "Imprint lithography for integrated circuit fabrication" JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B: MICROELECTRONICS PROCESSING AND PHENOMENA, AMERICAN VACUUM SOCIETY, NEW YORK, NY, US, vol. 21, no. 6, November 2003 (2003-11), pages 2624-2631, XP002310218 ISSN: 0734-211X
WISSEN M ET AL: "UV curing of resists for warm embossing" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 73-74, June 2004 (2004-06), pages 184-189, XP004564597 ISSN: 0167-9317
REANO R M ET AL: "Stability of functional polymers after plasticizer-assisted imprint lithography" J VAC SCI TECHNOL B MICROELECTRON NANOMETER STRUCT; JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B: MICROELECTRONICS AND NANOMETER STRUCTURES NOVEMBER/DECEMBER 2004, vol. 22, no. 6, November 2004 (2004-11), pages 3294-3299, XP002377834
BENDER M ET AL: "Fabrication of Nanostructures using a UV-based imprint technique" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 53, no. 1-4, June 2000 (2000-06), pages 233-236, XP004237761 ISSN: 0167-9317
Download PDF: