Title:
METHOD FOR INCREASING GAS SELECTION FUNCTIONS OF MULTIFUNCTIONAL GAS-SENSITIVE SENSOR, AND GAS-SENSITIVE SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/233225
Kind Code:
A1
Abstract:
Disclosed in the present application are a method for increasing gas selection functions of a multifunctional gas-sensitive sensor, and a gas-sensitive sensor. The method for increasing gas selection functions of a multifunctional gas-sensitive sensor of the present application comprises: forming a nano precious metal particle modification layer on a surface of a semiconductor gas-sensitive material layer of a probe of a gas-sensitive sensor, such that a single probe of the gas-sensitive sensor can implement the detection and selective regulation of at least three gases in an operating temperature range of 0-400°C. According to the method for increasing gas selection functions of a multifunctional gas-sensitive sensor of the present application, the modification of a surface of a semiconductor gas-sensitive material layer by using nano precious metal particles improves gas selectivity of a gas-sensitive sensor and expands the types of selectable gases, such that selective detection of at least three gases in the operating temperature range of 0-400°C can be implemented, and a new solution and approach are provided for preparing a multifunctional gas-sensitive sensor having more gas selection functions.
Inventors:
XU FANG (CN)
HE HAOPEI (CN)
HE HAOPEI (CN)
Application Number:
PCT/CN2022/087113
Publication Date:
November 10, 2022
Filing Date:
April 15, 2022
Export Citation:
Assignee:
UNIV SHENZHEN TECHNOLOGY (CN)
International Classes:
G01N27/12
Foreign References:
| CN113252736A | 2021-08-13 | |||
| CN107607591A | 2018-01-19 | |||
| CN110057869A | 2019-07-26 | |||
| US20120097917A1 | 2012-04-26 |
Other References:
WANG WEI, WANG XINJUN;LIU YANL: "Enhanced Acetone Sensing Performance of Au Nanoparticles Functionalized Flower-like ZnO", RARE METAL MATERIALS AND ENGINEERING, vol. 42, no. 8, 15 August 2013 (2013-08-15), CN , pages 1699 - 1702, XP055982977, ISSN: 1002-185X
FANG LIANG,PENG LIPING,YANG XIAOFEI ,HUANG QIULIU ,ZHOU KE ,WU FANG ,LIU GAOBIN ,MA YONG: "Study on NO2 Gas Sensing Characteristics of In-doped ZnO Thin Films Prepared by Rf Magnetron Sputtering", JOURNAL OF CHONGQING UNIVERSITY, vol. 32, no. 9, 15 September 2009 (2009-09-15), pages 1002 - 1005+1015, XP055982982, ISSN: 1000-582X
FANG LIANG,PENG LIPING,YANG XIAOFEI ,HUANG QIULIU ,ZHOU KE ,WU FANG ,LIU GAOBIN ,MA YONG: "Study on NO2 Gas Sensing Characteristics of In-doped ZnO Thin Films Prepared by Rf Magnetron Sputtering", JOURNAL OF CHONGQING UNIVERSITY, vol. 32, no. 9, 15 September 2009 (2009-09-15), pages 1002 - 1005+1015, XP055982982, ISSN: 1000-582X
Attorney, Agent or Firm:
DHC IP ATTORNEYS (CN)
Download PDF: