Title:
METHOD FOR INSPECTING GLASS SUBSTRATE FOR INFORMATION STORAGE MEDIUM, AND METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR INFORMATION STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2014/049947
Kind Code:
A1
Abstract:
An aspect of the present invention is a method for inspecting a glass substrate for an information storage medium, the method being provided with: a first inspection step for detecting defects existing on the surface of the glass substrate, and acquiring position information for the defects; a cleaning step after the first inspection step, for cleaning the surface of the glass substrate; a second inspection step after the cleaning step, for detecting defects existing on the surface of the glass substrate and acquiring position information for the defects; an assessment step for assessing the passing status of the glass substrate on the basis of the number of instances where the position information for defects acquired in the first inspection step and the position information for defects acquired in the second inspection step are consistent.
Inventors:
ENDO TAKESHI (JP)
FUKUMOTO NAOYUKI (JP)
FUKUMOTO NAOYUKI (JP)
Application Number:
PCT/JP2013/004957
Publication Date:
April 03, 2014
Filing Date:
August 22, 2013
Export Citation:
Assignee:
HOYA CORP (JP)
International Classes:
G11B5/84
Foreign References:
| JP2010108591A | 2010-05-13 | |||
| JP2001283430A | 2001-10-12 | |||
| JP2009064488A | 2009-03-26 | |||
| JP2001195731A | 2001-07-19 | |||
| JP2011070744A | 2011-04-07 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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