Title:
METHOD FOR INSPECTING FOR LEAKS IN GAS SUPPLY SYSTEM VALVES
Document Type and Number:
WIPO Patent Application WO/2017/018257
Kind Code:
A1
Abstract:
According to the present invention, an inspection is performed to identify leaks in valves provided in a plurality of pipelines connected to a plurality of gas sources. In a method according to one embodiment, a first valve provided in a first pipeline connected to a gas source is closed, and a second valve provided in the first pipeline downstream of the first valve is opened. A pressure increase downstream of the first pipeline is then detected using a pressure gauge. The first valve is then opened and the second valve is closed. A pressure increase downstream of the first pipeline is then detected using the pressure gauge.
Inventors:
SAWACHI ATSUSHI (JP)
AMIKURA NORIHIKO (JP)
AMIKURA NORIHIKO (JP)
Application Number:
PCT/JP2016/071054
Publication Date:
February 02, 2017
Filing Date:
July 15, 2016
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01M3/28; C23C16/455; H01L21/205; H01L21/3065
Foreign References:
| JPH08159908A | 1996-06-21 | |||
| JPH08184523A | 1996-07-16 | |||
| JP2013051315A | 2013-03-14 | |||
| JPH01281138A | 1989-11-13 | |||
| JP2013513028A | 2013-04-18 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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