Title:
METHOD FOR INSPECTING PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/054337
Kind Code:
A1
Abstract:
Provided is a method for inspecting a piezoelectric element in which voltage is applied to a piezoelectric element (10) and evaluation of the electrical characteristics of the piezoelectric element (10) is performed. The method includes a first step in which the piezoelectric element (10) is held on a flat plate-shaped slightly adhesive sheet (30) and a second step in which voltage is applied to the piezoelectric element (10) held on the slightly adhesive sheet (30) and evaluation of the electrical characteristics of the piezoelectric element (10) is performed.
Inventors:
OBATA HIROKI (JP)
UETANI MASAYUKI (JP)
IKEDA RYUSUKE (JP)
UETANI MASAYUKI (JP)
IKEDA RYUSUKE (JP)
Application Number:
PCT/JP2018/033486
Publication Date:
March 21, 2019
Filing Date:
September 10, 2018
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L41/22; H01L41/047
Domestic Patent References:
| WO2015060132A1 | 2015-04-30 | |||
| WO2015194461A1 | 2015-12-23 | |||
| WO2006109501A1 | 2006-10-19 |
Foreign References:
| JP2013161970A | 2013-08-19 |
Attorney, Agent or Firm:
CHIBA Yoshihiro et al. (JP)
Download PDF:
Previous Patent: METHOD FOR PRODUCING PIEZOELECTRIC ELEMENT
Next Patent: CHIP COMPONENT MANUFACTURING METHOD
Next Patent: CHIP COMPONENT MANUFACTURING METHOD