Title:
METHOD FOR JOINING QUARTZ PIECES AND QUARTZ ELECTRODES AND OTHER DEVICES OF JOINED QUARTZ
Document Type and Number:
WIPO Patent Application WO/2019/036525
Kind Code:
A3
Abstract:
A method for joining quartz pieces using metallic aluminum as the joining element. The aluminum may be placed between two quartz pieces and the assembly may be heated in the range of 500C to 650C. The joining atmosphere may be non-oxygenated. A method for the joining of quartz pieces which may include barrier layers on the quartz pieces. The barrier layers may be resistant to aluminum diffusion and may be of a metal oxide or metal nitride. The quartz pieces with the barrier layers may then be joined at temperatures higher than 650C and less than 1200C. A device such as an RF antenna or electrode in support of semiconductor processing using joined quartz pieces wherein the aluminum joining layer which has joined the pieces and also functions as antenna electrode.
Inventors:
ELLIOT BRENT (US)
HUSSEN GULEID (US)
STEPHENS JASON (US)
PARKER MICHAEL (US)
HUSSEN GULEID (US)
STEPHENS JASON (US)
PARKER MICHAEL (US)
Application Number:
PCT/US2018/046788
Publication Date:
April 02, 2020
Filing Date:
August 14, 2018
Export Citation:
Assignee:
COMPONENT RE ENG COMPANY INC (US)
ELLIOT BRENT (US)
HUSSEN GULEID (US)
STEPHENS JASON (US)
PARKER MICHAEL (US)
ELLIOT BRENT (US)
HUSSEN GULEID (US)
STEPHENS JASON (US)
PARKER MICHAEL (US)
International Classes:
C03C27/06; B32B17/00; C03B20/00; C03C3/04; C03C3/06; C03C17/06; C03C27/08
Foreign References:
| DE2923011A1 | 1980-03-27 | |||
| US20170216270A1 | 2017-08-03 | |||
| JP2011219352A | 2011-11-04 | |||
| CN102514346A | 2012-06-27 | |||
| US20140319684A1 | 2014-10-30 |
Attorney, Agent or Firm:
BACHAND, Edward N. (US)
Download PDF: