METHOD FOR MAKING MASK, MASK, AND FRAME-INTEGRATED MASK

WIPO Patent Application WO/2020/045900

A1

The present invention relates to a method for manufacturing a mask, a mask, and a frame-integrated mask. A method for manufacturing a mask according to the present invention includes the steps of: (a) forming a first insulating portion patterned on one surface of a metal sheet; (b) forming a first mask pattern of a predetermined depth by wet etching on one surface of the metal sheet; (c) filling a second insulating portion within at least the first mask pattern; (d) volatilizing at least a portion of the second insulating portion by baking; (e) exposing the upper portion of the first insulating portion and leaving only a second insulating portion located at a lower portion in the direction perpendicular to the first insulating portion; and (f) forming a second mask pattern penetrating the other surface of the metal sheet from the first mask pattern by wet etching on one surface of the metal sheet.

WO/2016/188238	MASK PLATE APPLIED IN LASER IRRADIATION AND LASER ENCAPSULATION METHOD THEREOF
WO/2016/101573	LIGHT-EMITTING LAYER AND PREPARATION METHOD, ORGANIC LIGHT EMITTING DIODE DEVICE AND DISPLAY APPARATUS
WO/2023/108456	LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREFOR, AND LIGHT-EMITTING APPARATUS

LEE BYUNG IL (KR)
KIM BONG JIN (KR)

PCT/KR2019/010741

March 05, 2020

August 23, 2019

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TGO TECH CORP (KR)

H01L51/56; C23C14/24; G03F7/20; H01L21/02; H01L51/00

JP2011044615A	2011-03-03
KR20040084314A	2004-10-06
KR20130046303A	2013-05-07
JP2005107195A	2005-04-21
JP2018053345A	2018-04-05
KR101986525B1	2019-06-07
KR101986526B1	2019-06-07

KIM, Han (KR)

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