Title:
METHOD OF MAKING TWO-COMPONENT NANOSPHERES AND THEIR USE AS A LOW DIELECTRIC CONSTANT MATERIAL FOR SEMICONDUCTOR DEVICES
Document Type and Number:
WIPO Patent Application WO1999012189
Kind Code:
A3
Abstract:
A process is provided for making an insulation layer for use in microelectronic devices, whereby capacitive coupling and propagation delay in the microelectronic devices are reduced. This invention can include the formation of a stable solution of spherical particles consisting of a ceramic core (10) and a non-polar coating (20). This solution can be applied to a microelectronic substrate, and dried to form a continuous, porous layer. Novel methods are disclosed for bonding these particles together into an integral layer. Porous layers formed by the process of this invention possess a very low dielectric constant, and can be produced using equipment and techniques common and available to those skilled in the art of microelectronic fabrication.
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Inventors:
AYERS MICHAEL R (US)
Application Number:
PCT/US1998/017981
Publication Date:
May 06, 1999
Filing Date:
August 31, 1998
Export Citation:
Assignee:
AYERS MICHAEL R (US)
International Classes:
H01L21/314; H01L21/316; H01L21/768; (IPC1-7): H01L21/31
Foreign References:
| US5837603A | 1998-11-17 | |||
| US5354611A | 1994-10-11 | |||
| US5453293A | 1995-09-26 | |||
| US5055342A | 1991-10-08 | |||
| US4865875A | 1989-09-12 |
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