Title:
METHOD FOR MANUFACTURE OF DIELECTRIC FILM HAVING ABOx TYPE of PEROVSKITE-TYPE CRYSTALLINE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2007/032193
Kind Code:
A1
Abstract:
A constituent solution for formation of a dielectric body is applied onto a first thin
film (31) and then heated/fired, wherein the first thin film (31) has an ABOx type
of perovskite-type crystalline structure and contains voids (42) having an
average diameter equal to or larger than a predetermined value and the constituent solution
contains particles each of which has an ABOx type of perovskite-type crystalline
structure and which has an average particle diameter smaller than the average
diameter of the voids (42). As a result, a second thin film (32) having an ABOx type
of perovskite-type crystalline structure. In this manner, a dielectric film
having an ABOx type of perovskite-type structure and composed of a laminate of
films each having an ABOx type of perovskite-type structure can be manufactured. The
boundary area between the first thin film (31) and the second thin film (32) in
the dielectric film becomes dense, since a part of the constituent solution is
incorporated into the voids (42) during the application of the constituent solution.
Inventors:
OKUMURA, Katsuya (22-1-103, Wakaba 1-chome Shinjuku-k, Tokyo 11, 1600011, JP)
奥村 勝弥 (〒11 東京都新宿区若葉一丁目２２番地１－１０３ Tokyo, 1600011, JP)
KITANO, Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 8611116, JP)
北野 高広 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 8611116, JP)
YAMANISHI, Yoshiki (1-8 Fuso-cho, Amagasaki-sh, Hyogo 91, 6600891, JP)
山西 良樹 (〒91 兵庫県尼崎市扶桑町１－８ 東京エレクトロンＡＴ株式会社内 Hyogo, 6600891, JP)
奥村 勝弥 (〒11 東京都新宿区若葉一丁目２２番地１－１０３ Tokyo, 1600011, JP)
KITANO, Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 8611116, JP)
北野 高広 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 8611116, JP)
YAMANISHI, Yoshiki (1-8 Fuso-cho, Amagasaki-sh, Hyogo 91, 6600891, JP)
山西 良樹 (〒91 兵庫県尼崎市扶桑町１－８ 東京エレクトロンＡＴ株式会社内 Hyogo, 6600891, JP)
Application Number:
JP2006/316630
Publication Date:
March 22, 2007
Filing Date:
August 24, 2006
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku Tokyo, 81, 1078481, JP)
東京エレクトロン株式会社 (〒81 東京都港区赤坂五丁目３番６号 Tokyo, 1078481, JP)
Octec Inc. (22-1-103, Wakaba 1-chome Shinjuku-k, Tokyo 11, 1600011, JP)
株式会社オクテック (〒11 東京都新宿区若葉一丁目２２番地１－１０３ Tokyo, 1600011, JP)
OKUMURA, Katsuya (22-1-103, Wakaba 1-chome Shinjuku-k, Tokyo 11, 1600011, JP)
奥村 勝弥 (〒11 東京都新宿区若葉一丁目２２番地１－１０３ Tokyo, 1600011, JP)
KITANO, Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 8611116, JP)
北野 高広 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 8611116, JP)
東京エレクトロン株式会社 (〒81 東京都港区赤坂五丁目３番６号 Tokyo, 1078481, JP)
Octec Inc. (22-1-103, Wakaba 1-chome Shinjuku-k, Tokyo 11, 1600011, JP)
株式会社オクテック (〒11 東京都新宿区若葉一丁目２２番地１－１０３ Tokyo, 1600011, JP)
OKUMURA, Katsuya (22-1-103, Wakaba 1-chome Shinjuku-k, Tokyo 11, 1600011, JP)
奥村 勝弥 (〒11 東京都新宿区若葉一丁目２２番地１－１０３ Tokyo, 1600011, JP)
KITANO, Takahiro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 8611116, JP)
北野 高広 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 8611116, JP)
International Classes:
C04B35/46; H01B19/00; H01G4/12; C04B35/46; H01B19/00; H01G4/12
Attorney, Agent or Firm:
KIMURA, Mitsuru (2nd Floor, Kyohan Building 7, Kandanishiki-cho 2-chom, Chiyoda-ku Tokyo, 101-0054, JP)
Previous Patent: WO/2007/032192
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