Title:
METHOD FOR MANUFACTURE OF PROBE PIN, AND METHOD FOR MANUFACTURE OF PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2002/097452
Kind Code:
A1
Abstract:
A method for manufacturing a probe card, which comprises a step of forming a plurality of amorphous alloy layers exhibiting a supercooling liquid temperature region and having a predetermined shape on a predetermined substrate, a step of heating the amorphous alloy layers to the supercooling liquid temperature region, a step of cooling the amorphous alloy layers to a temperature lower than the supercooling liquid temperature region, and a step of removing at least a part of the predetermined substrate in the state wherein the amorphous alloy layers are cooled to a temperature lower than the supercooling liquid temperature region.
Inventors:
TAKOSHIMA TAKEHISA (JP)
NARAZAKI WATARU (JP)
HATA SEIICHI (JP)
SHIMOKOUBE AKIRA (JP)
NARAZAKI WATARU (JP)
HATA SEIICHI (JP)
SHIMOKOUBE AKIRA (JP)
Application Number:
PCT/JP2002/005102
Publication Date:
December 05, 2002
Filing Date:
May 27, 2002
Export Citation:
Assignee:
ADVANTEST CORP (JP)
TAKOSHIMA TAKEHISA (JP)
NARAZAKI WATARU (JP)
HATA SEIICHI (JP)
SHIMOKOUBE AKIRA (JP)
TAKOSHIMA TAKEHISA (JP)
NARAZAKI WATARU (JP)
HATA SEIICHI (JP)
SHIMOKOUBE AKIRA (JP)
International Classes:
G01R1/073; G01R3/00; H01L21/66; (IPC1-7): G01R1/073; H01L21/66
Domestic Patent References:
| WO1997044676A1 | 1997-11-27 |
Foreign References:
| JP2000317900A | 2000-11-21 | |||
| JP2000317896A | 2000-11-21 | |||
| JPH11133062A | 1999-05-21 | |||
| JP2000241452A | 2000-09-08 | |||
| JPH01150862A | 1989-06-13 |
Other References:
Takenao TAKOSHIMA et al., "Micromachine Gijutsu o Mochiita LSI Test-yo Bisai probe pin no Kaihatsu", Heisei 13-nen, The Institute of Electrical Engineers of Japan, Zenkoku Taikai, 2001.03, page 1078
Seiichi HATA, Koichi WADA, Kaiji SATO, Akira SHIMOKAWABE, "Usumaku Kinzoku Garasu o Mochiita Bisai Kozobutsu no Seisaku (Dai 2-pro)", 2000-nendo, The Japan Society for Precision Engineering Shunki Koenkai Ronbunshu, 2000.03, page 401
Seiichi HATA, Jun GOTO, Kaiji SATO, Akira SHIMOKAWABE, "Usumaku Kinzoku Garasu o Mochiita Bisai Kozobutsu no Seisaku (Dai 1-po)", Journal of the Japan Society of Precision Engineering, 2000.01, Vol. 66, No. 1, p. 96-101
Seiichi HATA, Koichi WADA, Kaiji SATO, Akira SHIMOKAWABE, "Usumaku Kinzoku Garasu o Mochiita Bisai Kozobutsu no Seisaku (Dai 2-pro)", 2000-nendo, The Japan Society for Precision Engineering Shunki Koenkai Ronbunshu, 2000.03, page 401
Seiichi HATA, Jun GOTO, Kaiji SATO, Akira SHIMOKAWABE, "Usumaku Kinzoku Garasu o Mochiita Bisai Kozobutsu no Seisaku (Dai 1-po)", Journal of the Japan Society of Precision Engineering, 2000.01, Vol. 66, No. 1, p. 96-101
Attorney, Agent or Firm:
Ryuka, Akihiro (24-12 Shinjuku 1-chom, Shinjuku-ku Tokyo, JP)
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