Title:
METHOD FOR MANUFACTURE OF TOUCH PANEL, AND FILM FORMATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/004937
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a touch panel (1) comprising a transparent base plate (11) having a main surface (11a) on which an electrically conductive transparent film (13) is formed. In the method, the electrically conductive transparent film (13) is formed on the main surface (11a) of the transparent base plate (11) by carrying out a sputtering method by using a target (27) comprising a zinc oxide type material in a reactive gas atmosphere containing two or three gases selected from the group consisting of a hydrogen gas, an oxygen gas and water vapor.
Inventors:
TAKAHASHI HIROHISA (JP)
ISHIBASHI SATORU (JP)
ISHIBASHI SATORU (JP)
Application Number:
PCT/JP2009/062206
Publication Date:
January 14, 2010
Filing Date:
July 03, 2009
Export Citation:
Assignee:
ULVAC INC (JP)
TAKAHASHI HIROHISA (JP)
ISHIBASHI SATORU (JP)
TAKAHASHI HIROHISA (JP)
ISHIBASHI SATORU (JP)
International Classes:
C23C14/08; C23C14/34; G06F3/041; H01B5/14
Domestic Patent References:
| WO2003032332A1 | 2003-04-17 |
Foreign References:
| JPH0950712A | 1997-02-18 | |||
| JPS60111253A | 1985-06-17 | |||
| JP2001076887A | 2001-03-23 | |||
| JP2003532997A | 2003-11-05 | |||
| JP2004059964A | 2004-02-26 | |||
| JP2009176927A | 2009-08-06 | |||
| JP2004175074A | 2004-06-24 | |||
| JP2005047178A | 2005-02-24 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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