Title:
METHOD FOR MANUFACTURING AIR-SUSPENDED SINGLE CARBON NANOWIRE AND OVERLAPPING NANOELECTRODE PAIR
Document Type and Number:
WIPO Patent Application WO/2014/157991
Kind Code:
A1
Abstract:
The present invention provides a method for manufacturing an air-suspended single carbon nanowire and an overlapping nanoelectrode pair, and an air-suspended single carbon nanowire and an overlapping nanoelectrode pair manufactured using said method. An air-suspended single carbon nanowire, which is manufactured at a high yield ratio by the method for manufacturing an air-suspended single carbon nanowire according to the present invention, has a minimized size, and an air-suspended carbon nanomesh, which is manufactured at a high yield ratio by the method for manufacturing an overlapping nanoelectrode pair according to the present invention, is thin and dense. The present invention also provides a gas sensor or an electrochemical sensor, to which an air-suspended single carbon nanowire and an overlapping nanoelectrode pair manufactured by the method according to the present invention are applied.
Inventors:
SHIN HEUNG-JOO (KR)
HEO JEONG-IL (KR)
LIM YEONG-JIN (KR)
HEO JEONG-IL (KR)
LIM YEONG-JIN (KR)
Application Number:
PCT/KR2014/002670
Publication Date:
October 02, 2014
Filing Date:
March 28, 2014
Export Citation:
Assignee:
SK INNOVATION CO LTD (KR)
UNIST ACADEMY IND RES CORP (KR)
UNIST ACADEMY IND RES CORP (KR)
International Classes:
G01N27/407; B82B3/00; G01N27/30; H01L21/28
Foreign References:
| US20100051446A1 | 2010-03-04 |
Other References:
SWATI, SHARMA ET AL.: "Increased Graphitization in Electrospun Single Suspended Carbon Nanowires Integrated with Carbon-MEMS and Carbon-NEMS Platforms", ACS APPLIED MATERIALS & INTERFACES, vol. 4, no. 1, 3 January 2012 (2012-01-03), pages 34 - 39
HEO, JEONG-IL ET AL.: "SCALABLE SUSPENDED CARBON NANOWIRE MESHES AS ULTRASENSITIVE ELECTROCHEMICAL SENSING PLATFORMS", MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012 IEEE 25TH INTERNATIONAL CONFERENCE, 29 January 2012 (2012-01-29) - 22 February 2012 (2012-02-22), pages 878 - 881
VARUN, PENMATSA ET AL.: "Fabrication of carbon nanostructures using photo- nanoimprint lithography and pyrolysis", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 22, no. 4, 23 March 2012 (2012-03-23), pages 045024 - 045031
LIM, YEONG JIN ET AL.: "Monolithic carbon structures including suspended single nanowires and nanomeshes as a sensor platform", NANOSCALE RESEARCH LETTERS, vol. 8, no. 1, 20 November 2013 (2013-11-20), pages 1 - 9
HEO, JEONG-IL ET AL.: "SCALABLE SUSPENDED CARBON NANOWIRE MESHES AS ULTRASENSITIVE ELECTROCHEMICAL SENSING PLATFORMS", MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012 IEEE 25TH INTERNATIONAL CONFERENCE, 29 January 2012 (2012-01-29) - 22 February 2012 (2012-02-22), pages 878 - 881
VARUN, PENMATSA ET AL.: "Fabrication of carbon nanostructures using photo- nanoimprint lithography and pyrolysis", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 22, no. 4, 23 March 2012 (2012-03-23), pages 045024 - 045031
LIM, YEONG JIN ET AL.: "Monolithic carbon structures including suspended single nanowires and nanomeshes as a sensor platform", NANOSCALE RESEARCH LETTERS, vol. 8, no. 1, 20 November 2013 (2013-11-20), pages 1 - 9
Attorney, Agent or Firm:
KWON, Oh-Sig et al. (Hanbat-daeroSeo-gu, Daejeon 302-828, KR)
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