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Title:
METHOD FOR MANUFACTURING CAPACITIVE ACCELERATION SENSOR, DEVICE FOR MANUFACTURING SAME, AND CAPACITIVE ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/146368
Kind Code:
A1
Abstract:
A method for manufacturing a capacitive acceleration sensor that comprises a capacitor whose capacitance varies between a movable electrode and a fixed electrode depending on a displacement of the movable electrode comprises: a step of forming a groove on at least either one of a surface of an insulating substrate and a surface of a semiconductor substrate; a step of forming a hole penetrating the semiconductor substrate in the semiconductor substrate at a position communicating with a passage formed by the groove; and a step of forming a hole for electrode extraction penetrating the insulating substrate in the insulating substrate at a position communicating with a passage formed by the groove.

Inventors:
TSUNODA Takahiro (19-5, Nihonbashi Koami-cho, Chuo-k, Tokyo 34, 〒1038534, JP)
KUNIMI Takashi (19-5, Nihonbashi Koami-cho, Chuo-k, Tokyo 34, 〒1038534, JP)
SEKINE Toru (19-5, Nihonbashi Koami-cho, Chuo-k, Tokyo 34, 〒1038534, JP)
Application Number:
JP2013/057467
Publication Date:
October 03, 2013
Filing Date:
March 15, 2013
Export Citation:
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Assignee:
AKEBONO BRAKE INDUSTRY CO., LTD. (19-5, Nihonbashi Koami-cho Chuo-k, Tokyo 34, 〒1038534, JP)
International Classes:
G01P15/125; B81B3/00; B81C3/00; G01P15/08; H01L29/84
Foreign References:
JPH06160420A1994-06-07
JPH07128364A1995-05-19
JP2008528968A2008-07-31
JP2011095010A2011-05-12
JPH05142252A1993-06-08
JP2002005950A2002-01-09
JP2010145212A2010-07-01
JPH07245417A1995-09-19
Other References:
See also references of EP 2833153A4
Attorney, Agent or Firm:
HAMADA Yuriko et al. (Eikoh Patent Firm, Toranomon East Bldg. 10F 7-13, Nishi-Shimbashi 1-chome, Minato-k, Tokyo 03, 〒1050003, JP)
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