Title:
METHOD FOR MANUFACTURING CAPACITIVE ACCELERATION SENSOR, DEVICE FOR MANUFACTURING SAME, AND CAPACITIVE ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/146368
Kind Code:
A1
Abstract:
A method for manufacturing a capacitive acceleration sensor that comprises a capacitor whose capacitance varies between a movable electrode and a fixed electrode depending on a displacement of the movable electrode comprises: a step of forming a groove on at least either one of a surface of an insulating substrate and a surface of a semiconductor substrate; a step of forming a hole penetrating the semiconductor substrate in the semiconductor substrate at a position communicating with a passage formed by the groove; and a step of forming a hole for electrode extraction penetrating the insulating substrate in the insulating substrate at a position communicating with a passage formed by the groove.
Inventors:
TSUNODA TAKAHIRO (JP)
KUNIMI TAKASHI (JP)
SEKINE TORU (JP)
KUNIMI TAKASHI (JP)
SEKINE TORU (JP)
Application Number:
PCT/JP2013/057467
Publication Date:
October 03, 2013
Filing Date:
March 15, 2013
Export Citation:
Assignee:
AKEBONO BRAKE IND (JP)
International Classes:
G01P15/125; B81B3/00; B81C3/00; G01P15/08; H01L29/84
Foreign References:
| JPH06160420A | 1994-06-07 | |||
| JPH07128364A | 1995-05-19 | |||
| JP2008528968A | 2008-07-31 | |||
| JP2011095010A | 2011-05-12 | |||
| JPH05142252A | 1993-06-08 | |||
| JP2002005950A | 2002-01-09 | |||
| JP2010145212A | 2010-07-01 | |||
| JPH07245417A | 1995-09-19 |
Other References:
See also references of EP 2833153A4
Attorney, Agent or Firm:
HAMADA Yuriko et al. (JP)
Yuriko Hamada (JP)
Yuriko Hamada (JP)
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