Title:
METHOD FOR MANUFACTURING CARBON NANOTUBES
Document Type and Number:
WIPO Patent Application WO/2011/129613
Kind Code:
A2
Abstract:
The present invention relates to a method for manufacturing carbon nanotubes. The method for manufacturing carbon nanotubes comprises the following steps: forming a CNT coating layer containing carbon nanotubes on a substrate; forming a masking layer having hollow holes on the upper surface of the CNT coating layer, such that the masking layer serving as a nonconductor forms a pattern; and dry-etching the CNT coating layer which is not covered with the masking layer. The method of the present invention shortens working time, can be easily applied to large substrates, and enables the formation fine carbon nanotube patterns.
Inventors:
LEE, Dongmyeon (#902, 102dongByeoksan Apt., Bijeon 2-dong, Pyeongtaek-si, Gyeonggi-do 450-731, 450-731, KR)
이동면 (경기도 평택시 비전2동 벽산아파트 102동 902호, 450-731 Gyeonggi-do, 450-731, KR)
PARK, Dohyeong (#1302, 101dongUrim Fusionvill Apt., Munhyeong-ri, Opo-eup, Gwangju-si Gyeonggi-do 464-748, 464-748, KR)
이동면 (경기도 평택시 비전2동 벽산아파트 102동 902호, 450-731 Gyeonggi-do, 450-731, KR)
PARK, Dohyeong (#1302, 101dongUrim Fusionvill Apt., Munhyeong-ri, Opo-eup, Gwangju-si Gyeonggi-do 464-748, 464-748, KR)
Application Number:
KR2011/002638
Publication Date:
October 20, 2011
Filing Date:
April 13, 2011
Export Citation:
Assignee:
TOPNANOSYS.INC (100-3, Gosan-ri Opo-eup, Gwangju-si, Gyeonggi-do 464-891, 464-891, KR)
(주)탑나노시스 (경기도 광주시 오포읍 고산리 100-3, 464-891 Gyeonggi-do, 464-891, KR)
LEE, Dongmyeon (#902, 102dongByeoksan Apt., Bijeon 2-dong, Pyeongtaek-si, Gyeonggi-do 450-731, 450-731, KR)
이동면 (경기도 평택시 비전2동 벽산아파트 102동 902호, 450-731 Gyeonggi-do, 450-731, KR)
(주)탑나노시스 (경기도 광주시 오포읍 고산리 100-3, 464-891 Gyeonggi-do, 464-891, KR)
LEE, Dongmyeon (#902, 102dongByeoksan Apt., Bijeon 2-dong, Pyeongtaek-si, Gyeonggi-do 450-731, 450-731, KR)
이동면 (경기도 평택시 비전2동 벽산아파트 102동 902호, 450-731 Gyeonggi-do, 450-731, KR)
International Classes:
B82B3/00; B29D7/01; C01B31/02
Attorney, Agent or Firm:
CHUN, Sunghoon (B-1907, Samho Mulsan Bldg.275-6, Yangjae-dong, Seocho-gu, Seoul 137-941, 137-941, KR)
Claims:
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