Title:
METHOD FOR MANUFACTURING A COATED TOOL
Document Type and Number:
WIPO Patent Application WO/2016/017375
Kind Code:
A1
Abstract:
The present invention pertains to a method for manufacturing a coated tool whereby a thick high hardness DLC film can be formed while assuring superior adherence.
The method for manufacturing a coated tool for forming a diamond-like carbon film on the surface of a base material by a filtered arc ion plating method includes a first step wherein a negative bias voltage applied to the base material is set at -2500 - -1500 V, a mixed gas containing hydrogen gas is introduced into a furnace, and the surface of the base material undergoes gas bombardment treatment, and a second step wherein nitrogen gas is introduced into the furnace after the gas bombardment treatment, current is input to a graphite target, and the diamond-like carbon film is formed on the surface of the base material. The second step includes a step for reducing the flow rate of the nitrogen gas and a step for increasing the current input to the graphite target.
Inventors:
ABUSUILIK SALEH (JP)
Application Number:
PCT/JP2015/069401
Publication Date:
February 04, 2016
Filing Date:
July 06, 2015
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
C23C14/06; B21D37/01; B21D37/20; B23B27/14; B23B27/20; C23C14/02; C23C14/32
Domestic Patent References:
| WO2014133095A1 | 2014-09-04 | |||
| WO2014157560A1 | 2014-10-02 |
Foreign References:
| JP2004501793A | 2004-01-22 | |||
| JP2010005744A | 2010-01-14 | |||
| JPH1192934A | 1999-04-06 | |||
| JP2004054991A | 2004-02-19 | |||
| JP2013253266A | 2013-12-19 |
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