METHOD FOR MANUFACTURING COMB-TOOTHED ELEMENT

Title:

METHOD FOR MANUFACTURING COMB-TOOTHED ELEMENT

Document Type and Number:

WIPO Patent Application WO/2020/101015

Kind Code:

A1

Abstract:

A method for manufacturing a comb-toothed element that comprises a plurality of fixed comb teeth and a plurality of movable comb teeth positioned so as to mesh with one another with a gap interposed therebetween, the amount of meshing of said movable comb teeth with regard to said fixed comb teeth being variable, wherein first mask patterns for forming the fixed comb teeth and second mask patterns for forming the movable comb teeth are formed on a surface of a substrate to be etched, a mask pattern to be etched is formed, said mask pattern to be etched being positioned on the substrate to be etched between neighboring first mask patterns and between neighboring second mask patterns, and having a thickness in accordance with a first gap dimension between fixed comb teeth and movable comb teeth that are neighboring, and in accordance with a second gap dimension between fixed comb teeth that are neighboring one another, and the substrate to be etched and the mask pattern to be etched are etched using Deep-RIE to form the fixed comb teeth and the movable comb teeth.

Inventors:

TOSHIYOSHI HIROSHI (JP)
HONMA HIROAKI (JP)
MITSUYA HIROYUKI (JP)

Application Number:

PCT/JP2019/044861

Publication Date:

May 22, 2020

Filing Date:

November 15, 2019

Export Citation:

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Assignee:

UNIV TOKYO (JP)
SAGINOMIYA SEISAKUSHO INC (JP)

International Classes:

B81B3/00; B81C1/00; H02N1/00

Domestic Patent References:

WO2015019919A1

2015-02-12

Foreign References:

JP2015023292A	2015-02-02
JP2000077681A	2000-03-14
JP2015534726A	2015-12-03
JP2017070163A	2017-04-06
JP2016082836A	2016-05-16
JP2018088780A	2018-06-07
JP2013013256A	2013-01-17
JP2016082836A	2016-05-16
JP2018215631A	2018-11-16

Other References: