Title:
METHOD FOR MANUFACTURING CURED FILM, CURED FILM, LIQUID CRYSTAL DISPLAY DEVICE AND ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/088018
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a cured film capable of improving the resolution of a cured film. The method comprises, in this order: (1) a step of applying a photosensitive resin composition to a substrate; (2) a step of removing a solvent from the photosensitive resin composition; (3) a step of washing the photosensitive resin composition from which the solvent was removed with a solution having a pKa value of 3 or less; (4) a step of exposing the photosensitive resin composition to an active beam; (5) a step of developing the exposed photosensitive resin composition with an aqueous developing solution; and (6) a post-baking step of thermally curing the developed photosensitive resin composition. The photosensitive resin composition contains: a polymer (A1) having a structural unit (a1) in which an acid radical has a residue protected by an acid-decomposable group and a structural unit (a2) having a crosslinkable group; a polymer component (A2) including a polymer satisfying at least either a polymer having a structural unit (a1) in which an acid radical has a residue protected by an acid-decomposable group or a polymer having a structural unit (a2) having a crosslinkable group; a photoacid generator (B); and a solvent (C).
Inventors:
SATAKE RYO (JP)
YONEZAWA HIROYUKI (JP)
YONEZAWA HIROYUKI (JP)
Application Number:
PCT/JP2013/082531
Publication Date:
June 12, 2014
Filing Date:
December 04, 2013
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G03F7/38; C08F212/14; C08F220/26; C08F220/28; C08F220/56; G03F7/039; G03F7/40; H01L21/027; H01L51/50; H05B33/22; G02F1/1333
Foreign References:
| JP2011209681A | 2011-10-20 | |||
| JPH05341536A | 1993-12-24 | |||
| JP2002148820A | 2002-05-22 | |||
| JP2000231197A | 2000-08-22 | |||
| JP2005277053A | 2005-10-06 | |||
| JPH06267838A | 1994-09-22 | |||
| JPH0540346A | 1993-02-19 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
Patent business corporation patent firm Sykes (JP)
Patent business corporation patent firm Sykes (JP)
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