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Title:
METHOD FOR MANUFACTURING CURED PRODUCT PATTERN, METHOD FOR MANUFACTURING PROCESSED SUBSTRATE, METHOD FOR MANUFACTURING CIRCUIT BOARD, METHOD FOR MANUFACTURING ELECTRONIC COMPONENT, AND METHOD FOR MANUFACTURING IMPRINT MOLD
Document Type and Number:
WIPO Patent Application WO/2019/116976
Kind Code:
A1
Abstract:
This method for manufacturing a cured product pattern comprises in the order presented: a step of disposing a droplet of a curable composition on a substrate; a step of bringing a mold, on the surface of which a pattern having recesses and protrusions is formed, and the curable composition into contact with each other; a step of curing the curable composition; and a step of separating a cured product comprising the curable composition from the mold, thereby manufacturing a cured product pattern of the curable composition, the method being characterized in that the mold has a recessed part having a bottom surface, and a staircase structure disposed such that an open surface widens from the bottom surface toward the top surface of the mold, and in the contacting step, after the bottom surface and the top of the droplet come into contact with each other, the curable composition and the staircase portion come into contact with each other.

Inventors:
OTANI TOMONORI (JP)
ITO TOSHIKI (JP)
SAITO TOMOHIRO (JP)
NAGANE KOUHEI (JP)
UEYAMA KENICHI (JP)
Application Number:
PCT/JP2018/044660
Publication Date:
June 20, 2019
Filing Date:
December 05, 2018
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
H01L21/027; B29C33/38; B29C33/42; B29C59/02
Foreign References:
JPH11160510A1999-06-18
JP2011508686A2011-03-17
JP2013202982A2013-10-07
US9147687B22015-09-29
US6936194B22005-08-30
JP2018157093A2018-10-04
JP2018125377A2018-08-09
JP2018098274A2018-06-21
JP2018085491A2018-05-31
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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