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Title:
METHOD FOR MANUFACTURING CYLINDRICAL PIEZOELECTRIC ELEMENT, CYLINDRICAL PIEZOELECTRIC ELEMENT AND MICRODRIVE MECHANISM
Document Type and Number:
WIPO Patent Application WO/2013/051622
Kind Code:
A1
Abstract:
A cylindrical piezoelectric element (10) is manufactured by the following manufacturing method. The inner surface of a cylindrical piezoelectric material (3) has disposed thereon a reference electrode (5-21). The outer surface of the cylindrical piezoelectric material (3) has disposed thereon a plurality of drive electrodes (5-1, 5-2) having prescribed widths in the circumferential direction and extending from one end to the other end in the axial direction. A portion of the outer surface of the cylindrical piezoelectric material (3) in the vicinity of the one end of the cylindrical piezoelectric material (3) in the axial direction has disposed thereon a polarization electrode (5-11) in a manner in which the polarized electrode is in series with and electrically connected to the plurality of driving electrodes (5-1, 5-2) in the axial direction. A prescribed voltage is applied between the polarization electrode (5-11) and the reference electrode (5-21), the region of the cylindrical piezoelectric material (3) corresponding to the plurality of driving electrodes (5-1, 5-2) is polarized, and the polarization electrode (5-11) of the cylindrical piezoelectric material (3) is removed.

Inventors:
SAKAI NAGAHIDE (JP)
Application Number:
JP2012/075689
Publication Date:
April 11, 2013
Filing Date:
October 03, 2012
Export Citation:
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Assignee:
OLYMPUS CORP (JP)
International Classes:
H01L41/22; G02B26/10; H01L41/09; H01L41/187
Foreign References:
JPH07287022A1995-10-31
JPH02113104U1990-09-11
JP2003046159A2003-02-14
JPH0265185A1990-03-05
JPH05343759A1993-12-24
Attorney, Agent or Firm:
KURATA, Masatoshi et al. (JP)
Masatoshi Kurata (JP)
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Claims: