Title:
METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/024325
Kind Code:
A1
Abstract:
The present application provides a method for manufacturing a device, comprising: forming a solar cell layer on a substrate; forming a photoresist layer on the side of the solar cell layer away from the substrate; covering the side of the photoresist layer away from the substrate with a mask, the mask having a gate-line-shaped pattern; performing exposure under the covering of the mask to form an exposure area in the photoresist layer; washing off the photoresist layer in the exposure area in a developing solution to form a developing tank; forming a metal layer in the developing tank and on the side of the photoresist layer away from the substrate; carrying out thermal-cold cycling on the photoresist layer and the metal layer so that the metal layer on the side wall of the developing tank is broken to form a fracture opening; and removing the photoresist layer and the metal layer on the side of the photoresist layer away from the substrate. That is, breaking the metal layer on the side wall of the developing tank by means of thermal-cold cycling to disconnect the metal layer on the surface of the photoresist layer from a metal gate line in the developing tank can promote contact between an organic solvent and a photoresist, thereby improving the demolding efficiency, and can also prevent the gate line from being removed in the demolding process, thereby improving the device performance.
Inventors:
LI XINLIAN (CN)
XIAO PING (CN)
ZHAO ZHIGUO (CN)
ZHAO DONGMING (CN)
ZHANG YUN (CN)
XIA YUAN (CN)
QIN XIAOJUN (CN)
WANG XUELING (CN)
XIAO PING (CN)
ZHAO ZHIGUO (CN)
ZHAO DONGMING (CN)
ZHANG YUN (CN)
XIA YUAN (CN)
QIN XIAOJUN (CN)
WANG XUELING (CN)
Application Number:
PCT/CN2021/136667
Publication Date:
March 02, 2023
Filing Date:
December 09, 2021
Export Citation:
Assignee:
HUANENG CLEAN ENERGY RES INST (CN)
International Classes:
G03F7/42
Foreign References:
| CN110610901A | 2019-12-24 | |||
| CN105974620A | 2016-09-28 | |||
| US20190131168A1 | 2019-05-02 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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