Title:
METHOD FOR MANUFACTURING DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/144666
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a display device with which high definition is facilitated. Also provided is a display device that combines a high display quality with high definition. In the present invention: a first EL film is formed on a first pixel electrode and a second pixel electrode, a first sacrificial film is formed to cover the first EL film, etching is performed on the first sacrificial film and the first EL film so that the second pixel electrode is exposed; and a first EL layer is formed on the first pixel electrode, the first sacrificial film is formed on the first EL layer, and the first sacrificial film is removed. The first EL film and a second EL film are etched by dry etching and the first sacrificial film is removed by wet etching.
Inventors:
NAKAMURA DAIKI (JP)
AOYAMA TOMOYA (JP)
NAKAZAWA YASUTAKA
SATO RAI (JP)
YASUMOTO SEIJI (JP)
OGINO KIYOFUMI (JP)
SHIRAISHI TAKASHI
AOYAMA TOMOYA (JP)
NAKAZAWA YASUTAKA
SATO RAI (JP)
YASUMOTO SEIJI (JP)
OGINO KIYOFUMI (JP)
SHIRAISHI TAKASHI
Application Number:
PCT/IB2021/061808
Publication Date:
July 07, 2022
Filing Date:
December 16, 2021
Export Citation:
Assignee:
SEMICONDUCTOR ENERGY LAB (JP)
International Classes:
H05B33/10; G09F9/00; G09F9/30; H01L27/32; H01L51/50; H05B33/04; H05B33/24
Domestic Patent References:
| WO2015041053A1 | 2015-03-26 |
Foreign References:
| JP2012216501A | 2012-11-08 | |||
| JP2013168242A | 2013-08-29 | |||
| JP2008098106A | 2008-04-24 | |||
| JP2014044810A | 2014-03-13 | |||
| JP2013114805A | 2013-06-10 |
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