Title:
METHOD FOR MANUFACTURING AN ELASTIC SURFACE WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/232562
Kind Code:
A1
Abstract:
The invention relates to a method for manufacturing an elastic wave device configured to operate at a frequency lower than 1 GHz, and formed on a POI substrate, the formation of the POI substrate comprising the following steps: - a) a step of implanting species in a LiTaO3 substrate (210) so as to form a useful layer (150); and - b) a step of transferring the useful layer onto a front face of a support substrate (110); the method further comprising the formation of an intermediate stack, positioned between the front face and the useful layer, and which comprises, starting from the front face, a first layer (120), a second layer (130) and a third layer (140), the first layer comprising silicon dioxide, the second layer comprising silicon nitride, alumina or aluminium nitride, and the third layer comprising silicon dioxide or amorphous silicon.
Inventors:
BALLANDRAS SYLVAIN (FR)
LAROCHE THIERRY (FR)
BERNARD FLORENT (FR)
COURJON EMILIE (FR)
N'DIAYE SALY (FR)
HUYET ISABELLE (FR)
LAROCHE THIERRY (FR)
BERNARD FLORENT (FR)
COURJON EMILIE (FR)
N'DIAYE SALY (FR)
HUYET ISABELLE (FR)
Application Number:
PCT/EP2023/063810
Publication Date:
December 07, 2023
Filing Date:
May 23, 2023
Export Citation:
Assignee:
SOITEC SILICON ON INSULATOR (FR)
International Classes:
H03H3/08; H03H9/02
Foreign References:
| US20210265980A1 | 2021-08-26 | |||
| US20170331501A1 | 2017-11-16 | |||
| US20190319603A1 | 2019-10-17 | |||
| US20210152154A1 | 2021-05-20 | |||
| US20200028486A1 | 2020-01-23 | |||
| FR3127660A1 | 2023-03-31 | |||
| US20140152146A1 | 2014-06-05 |
Other References:
T. PASTUREAUD ET AL.: "High-Frequency Surface Acoustic Waves Excited on Thin-Oriented LiNbO Single-Crystal Layers Transferred Onto Silicon", IEEE TRANS. ON UFFC, vol. 54, no. 4, 2007, pages 870 - 876, XP011176671, DOI: 10.1109/TUFFC.2007.321
S. BALLANDRAS ET AL.: "Simulations of surface acoustic wave devices built on stratified media using a mixed finite elementlboundary intégral formulation", JOURNAL OF APPLIED PHYSICS, vol. 95, no. 12, 2004, pages 7731 - 7741
S. BALLANDRAS ET AL.: "Simulations of surface acoustic wave devices built on stratified media using a mixed finite elementlboundary intégral formulation", JOURNAL OF APPLIED PHYSICS, vol. 95, no. 12, 2004, pages 7731 - 7741
Attorney, Agent or Firm:
IP TRUST (FR)
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