Title:
METHOD FOR MANUFACTURING ELECTRON-EMITTING DEVICE AND METHOD FOR MANUFACTURING DISPLAY HAVING ELECTRON-EMITTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2004/100202
Kind Code:
A1
Abstract:
A method for manufacturing an electron-emitting device is disclosed wherein damage to an emitter material (such as carbon nanotubes) during removal of a protective film is reduced. The method for manufacturing an electron-emitting device comprises a first step wherein an emitter layer (10) containing carbon nanotubes (11) which serve as a fibrous emitter material is formed on a cathode (5), a second step wherein an insulating layer (6) and a gate electrode (7) are formed on the emitter layer (10) via a protective film (22), a third step wherein a gate hole (8) is formed through the insulating layer (6) and the gate electrode (7) on the emitter layer (10), and a fourth step wherein the protective film (22) exposed by the formation of the gate hole (8) is removed using a weakly acidic etching solution.
Inventors:
Yagi, Takao
Toyota, Motohiro
Shimamura, Toshiki
Toyota, Motohiro
Shimamura, Toshiki
Application Number:
PCT/JP2004/006474
Publication Date:
November 18, 2004
Filing Date:
May 07, 2004
Export Citation:
Assignee:
SONY CORPORATION (7-35, Kitashinagawa 6-chome Shinagawa-ku, Tokyo, 141-0001, JP)
Yagi, Takao
Toyota, Motohiro
Shimamura, Toshiki
Yagi, Takao
Toyota, Motohiro
Shimamura, Toshiki
International Classes:
H01J9/02; H01J1/304; H01J31/12; (IPC1-7): H01J9/02
Attorney, Agent or Firm:
Nakamura, Tomoyuki c/o Miyoshi International Patent Office (Toranomon Kotohira Tower 2-8, Toranomon 1-chom, Minato-ku Tokyo, 105-0001, JP)