Title:
METHOD FOR MANUFACTURING ELECTRONIC CIRCUIT COMPONENT
Document Type and Number:
WIPO Patent Application WO/2008/018392
Kind Code:
A1
Abstract:
This invention provides a method for manufacturing an electronic circuit component
such as organic TFT1. In the method, an insulating layer having better properties
and an electroconductive layer can be formed particularly on a general-purpose
plastic substrate or the like by treatment at a processing temperature of 200°C
or below which does not affect the plastic substrate and the like. Accordingly,
an electronic circuit component, which is highly reliable and has quality on
a practical level, can be manufactured. In the method for manufacturing an electronic
circuit component, a layer containing at least one of polyimides and precursors
thereof is heated to a temperature of 200°C or below to form an insulating
layer (4) having a contact angle with water of not less than 80 degrees. A coating
film is formed using a dispersion liquid containing metallic nanoparticles
on the insulating layer (4), and the coating film is fired at a temperature of 200°C
or below to form electroconductive layers such as a source electrode (5) and a
drain electrode (6).
Inventors:
MAEDA, Shinichi (722-1, Tsuboi-cho, Funabashi-sh, Chiba 07, 2748507, JP)
前田 真一 (〒07 千葉県船橋市坪井町７２２番地１ 日産化学工業株式会社 電子材料研究所内 Chiba, 2748507, JP)
ONO, Go (722-1, Tsuboi-cho, Funabashi-sh, Chiba 07, 2748507, JP)
小野 豪 (〒07 千葉県船橋市坪井町７２２番地１ 日産化学工業株式会社 電子材料研究所内 Chiba, 2748507, JP)
前田 真一 (〒07 千葉県船橋市坪井町７２２番地１ 日産化学工業株式会社 電子材料研究所内 Chiba, 2748507, JP)
ONO, Go (722-1, Tsuboi-cho, Funabashi-sh, Chiba 07, 2748507, JP)
小野 豪 (〒07 千葉県船橋市坪井町７２２番地１ 日産化学工業株式会社 電子材料研究所内 Chiba, 2748507, JP)
Application Number:
JP2007/065296
Publication Date:
February 14, 2008
Filing Date:
August 03, 2007
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 5410041, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
Nissan Chemical Industries, Ltd. (7-1 Kanda Nishiki-cho 3-chome, Chiyoda-ku Tokyo, 54, 1010054, JP)
日産化学工業株式会社 (〒54 東京都千代田区神田錦町３丁目７番地１ Tokyo, 1010054, JP)
MAEDA, Shinichi (722-1, Tsuboi-cho, Funabashi-sh, Chiba 07, 2748507, JP)
前田 真一 (〒07 千葉県船橋市坪井町７２２番地１ 日産化学工業株式会社 電子材料研究所内 Chiba, 2748507, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
Nissan Chemical Industries, Ltd. (7-1 Kanda Nishiki-cho 3-chome, Chiyoda-ku Tokyo, 54, 1010054, JP)
日産化学工業株式会社 (〒54 東京都千代田区神田錦町３丁目７番地１ Tokyo, 1010054, JP)
MAEDA, Shinichi (722-1, Tsuboi-cho, Funabashi-sh, Chiba 07, 2748507, JP)
前田 真一 (〒07 千葉県船橋市坪井町７２２番地１ 日産化学工業株式会社 電子材料研究所内 Chiba, 2748507, JP)
International Classes:
H01L21/288; H01L21/336; H01L29/786; H01L51/05; H01L21/02; H01L29/66; H01L51/05
Attorney, Agent or Firm:
NAITO, Teruo et al. (Shin-ei Patent Office, 7-13 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 03, 1050003, JP)