METHOD OF MANUFACTURING AN ELECTRONIC DEVICE IN A CAVITY WITH A COVER

Title:

METHOD OF MANUFACTURING AN ELECTRONIC DEVICE IN A CAVITY WITH A COVER

Document Type and Number:

WIPO Patent Application WO2003084861

Kind Code:

A3

Abstract:

The electronic device (100) comprises an electrical element (30), for instance a MEMS capacitor or a BAW filterin a cavity (37) that is protected from the environment by a cover (38). The cover (38) is a patterned layer which is mechanically embedded in isolating material (7) present beside the cavity (37) and may further include contact pads (41). The device (100) may be suitably manufactured from an accurately folded foil including a patterned layerand a sacrifice layer. After applying the foil to the cavity (37) the isolating material (7) is provided and the sacrifice layer is removed. The patterned layer, or part thereof, stays behind and forms the cover (38).

Inventors:

WEEKAMP JOHANNES W (NL)

Application Number:

PCT/IB2003/001300

Publication Date:

May 13, 2004

Filing Date:

April 10, 2003

Export Citation:

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Assignee:

KONINKL PHILIPS ELECTRONICS NV (NL)
WEEKAMP JOHANNES W (NL)

International Classes:

B81B7/00; B81C3/00; H01L23/31; H01L23/498; H01L23/538; H03H3/007; H03H9/05; H03H9/10; H05K1/00; H05K1/02; H01L23/10; H05K1/18; H05K3/20; (IPC1-7): B81B7/00; H03H9/05

Foreign References:

EP0828346A2	1998-03-11
US5738797A	1998-04-14

Other References: