Title:
METHOD FOR MANUFACTURING ELECTRONIC DEVICE, LASER APPARATUS, AND WAVELENGTH SEQUENCE CALCULATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/135658
Kind Code:
A1
Abstract:
This method for manufacturing an electronic device includes: acquiring a pulse spectral shape of pulsed laser light, and a target integrated spectral shape to be realized via pulsed laser light of a plurality of pulses generated on the basis of a wavelength sequence in which the center wavelength of the pulsed laser light is periodically changed; calculating a plurality of target center wavelengths assigned to a plurality of pulses to realize a target integrated spectral shape, and the number of assigned pulses for each target center wavelength, which are the number of assigned pulses per cycle of the wavelength sequence; assigning each of at least one first center wavelength having an assigned number of pulses of 2 or more among the target center wavelengths, so that the time interval between assigned pulses becomes commensurately greater as the number of assigned pulses becomes smaller; and then calculating a wavelength sequence by assigning each of at least one second center wavelength having an assigned number of pulses of 1 among the target center wavelengths.
Inventors:
FUJII KOICHI (JP)
ISHIHARA TAKANOBU (JP)
WAKABAYASHI OSAMU (JP)
ISHIHARA TAKANOBU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2022/000609
Publication Date:
July 20, 2023
Filing Date:
January 11, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20
Foreign References:
| JP2007511074A | 2007-04-26 | |||
| JP2009141154A | 2009-06-25 | |||
| JPH0758393A | 1995-03-03 | |||
| JP2008140956A | 2008-06-19 | |||
| JP2009010231A | 2009-01-15 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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