METHOD FOR MANUFACTURING FERROELECTRIC DEVICE - PANASONIC ELECTRIC WORKS CO., LTD.

Title:

METHOD FOR MANUFACTURING FERROELECTRIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2011/125754

Kind Code:

A1

Abstract:

Disclosed is a method for manufacturing a ferroelectric device, wherein a seed layer having a predetermined pattern is formed on one surface of a second substrate, and a ferroelectric layer is formed on the said surface of the second substrate. A lower electrode is formed on the ferroelectric layer, and the lower electrode and a first substrate are bonded together with a bonding layer therebetween. A laser beam having a predetermined wavelength is applied from the other surface of the second substrate, and a ferroelectric film that overlaps the seed layer, said ferroelectric film being a part of the ferroelectric layer, and the seed layer are transferred to one surface of the first substrate. The laser beam has the wavelength, with which the beam passes through the second substrate, is reflected by the seed layer, and is absorbed by the second portion of the ferroelectric layer, said second portion not overlapping the seed layer.

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Inventors:

MATSUSHIMA, Tomoaki (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
松嶋　朝明 (〒86 大阪府門真市大字門真１０４８番地　パナソニック電工株式会社内 Osaka, 〒5718686, JP)
YAMAUCHI, Norihiro (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
山内　規裕 (〒86 大阪府門真市大字門真１０４８番地　パナソニック電工株式会社内 Osaka, 〒5718686, JP)

Application Number:

JP2011/058048

Publication Date:

October 13, 2011

Filing Date:

March 30, 2011

Export Citation:

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Assignee:

PANASONIC ELECTRIC WORKS CO., LTD. (1048, Oaza-Kadoma Kadoma-sh, Osaka 86, 〒5718686, JP)
パナソニック電工株式会社 (〒86 大阪府門真市大字門真１０４８番地 Osaka, 〒5718686, JP)
MATSUSHIMA, Tomoaki (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)
松嶋　朝明 (〒86 大阪府門真市大字門真１０４８番地　パナソニック電工株式会社内 Osaka, 〒5718686, JP)
YAMAUCHI, Norihiro (1048, Oaza-Kadoma, Kadoma-sh, Osaka 86, 〒5718686, JP)

International Classes:

H01L41/22; B81C3/00; G01J1/02; H01L21/8246; H01L27/105; H01L41/08; H01L41/113; H01L41/18; H01L41/24

Attorney, Agent or Firm:

NISHIKAWA, Yoshikiyo et al. (Hokuto Patent Attorneys Office, Umeda Square Bldg. 9F., 12-17, Umeda 1-chome, Kita-ku, Osaka-sh, Osaka 01, 〒5300001, JP)

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