Title:
METHOD FOR MANUFACTURING FINE PARTICLES
Document Type and Number:
WIPO Patent Application WO/2013/047678
Kind Code:
A1
Abstract:
The present invention is equipped with: a fine division step wherein a cutting or grinding device (1) equipped with a fixed abrasive grain wire (2) to which abrasive grains are adhered, a support unit (8) that supports an material (10) to be processed, and a coolant liquid supply unit (9) that supplies a coolant liquid, is used to cut or to grind the material (10) to be processed by relatively moving the fixed abrasive grain wire (2) or the material (10) to be processed in a reciprocating motion or a rotating motion while the coolant liquid is supplied; a recovery step wherein fine particles (11) are formed by the cutting or grinding of the material (10) to be processed, and the fine particles together with the coolant liquid are recovered as a slurry; and an extraction step wherein fine particles having a normal distribution for which the average grain diameter is a submicron value are extracted from this slurry.
Inventors:
YAMAOKA TAKASHI (JP)
SAKANISHI KOJI (JP)
SAKANISHI KOJI (JP)
Application Number:
PCT/JP2012/074928
Publication Date:
April 04, 2013
Filing Date:
September 27, 2012
Export Citation:
Assignee:
YASUNAGA KK (JP)
International Classes:
B24B27/06; B24B55/12; B28D5/04; C01B33/02; H01L21/304
Foreign References:
| JP2010253622A | 2010-11-11 | |||
| JPH10328999A | 1998-12-15 | |||
| JP2011167810A | 2011-09-01 | |||
| JP2005186169A | 2005-07-14 | |||
| JPH11151655A | 1999-06-08 |
Attorney, Agent or Firm:
NAGATO, KANJI (JP)
Nagato δΎƒ 2 (JP)
Nagato δΎƒ 2 (JP)
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Claims:
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