Title:
METHOD FOR MANUFACTURING FLUOROCARBON THIN FILM
Document Type and Number:
WIPO Patent Application WO/2017/039339
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a fluorocarbon thin film and a continuous roll-to-roll method-based sputtering deposition system for the manufacturing thereof by which conductivity is imparted on a super water repellent and high insulating fluorine-based polymer, thereby enabling plasma to be stably formed even by means of the industrially widely used DC and MF power supply systems, thus enabling sputtering even at a more lower energy.
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Inventors:
LEE SANG JIN (KR)
LEE JAE HEUNG (KR)
CHOI WOO JIN (KR)
CHO SEONG KEUN (KR)
HAM DONG SEOK (KR)
LEE JAE HEUNG (KR)
CHOI WOO JIN (KR)
CHO SEONG KEUN (KR)
HAM DONG SEOK (KR)
Application Number:
PCT/KR2016/009757
Publication Date:
March 09, 2017
Filing Date:
September 01, 2016
Export Citation:
Assignee:
KOREA RES INST CHEMICAL TECH (KR)
International Classes:
C23C14/12; C09D127/12; C23C14/06; C23C14/34; C23C14/35; C23C14/56; D06M15/277
Foreign References:
| JP2004268311A | 2004-09-30 | |||
| JP2008138263A | 2008-06-19 | |||
| KR20110105847A | 2011-09-27 | |||
| KR20070113220A | 2007-11-28 | |||
| KR20140086989A | 2014-07-08 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
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