Title:
METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR HDD
Document Type and Number:
WIPO Patent Application WO/2013/099083
Kind Code:
A1
Abstract:
This method for manufacturing a glass substrate for an HDD is characterized in that: the method has a step wherein a double-sided polishing machine is used; the step has a step of cleaning a polishing agent slurry left on the glass substrate or the like after polishing, and a step of forming a lubricating layer by adding, to the polishing pad, the polishing agent slurry containing colloidal silica; the average primary particle diameter of the colloidal silica is 15-90 nm; and that the surface density of the colloidal silica in the lubricating layer is 10-500 particles/μm2. In this manufacturing method, the glass substrate having excellent planarity and less fine warping can be obtained.
Inventors:
KAWAI HIDEKI (JP)
KOMATSU TAKAFUMI (JP)
KOMATSU TAKAFUMI (JP)
Application Number:
PCT/JP2012/007072
Publication Date:
July 04, 2013
Filing Date:
November 05, 2012
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
G11B5/84; B24B37/00; B24B37/08; B24B37/20
Domestic Patent References:
| WO2004058450A1 | 2004-07-15 |
Foreign References:
| JP2006351081A | 2006-12-28 | |||
| JP2001155332A | 2001-06-08 | |||
| JP2006095677A | 2006-04-13 | |||
| JP2001006162A | 2001-01-12 |
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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