Title:
METHOD FOR MANUFACTURING INTERPOSER
Document Type and Number:
WIPO Patent Application WO/2012/014718
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing an interposer provided with a plurality of through electrodes. Said method includes: a laser-light focusing step for forming modified regions in a flat silicon workpiece by focusing laser light on the workpiece; an etching treatment step, performed subsequent to the laser-light focusing step, for forming in the workpiece a plurality of through holes, which have a rectangular cross section and are angled relative to the thickness direction of the workpiece, by anisotropically etching the workpiece in a manner such that the etching selectively progresses along the modified regions; an insulating film formation step, performed subsequent to the etching treatment step, for forming an insulating film on the inside wall of each through hole; and a through electrode formation step, performed subsequent to the insulating film formation step, for forming through electrodes by filling each through hole with a conductor. When viewed from the principal surface of the workpiece, the through holes, which are aligned in the direction in which said through holes are angled, are staggered in the direction perpendicular to the direction in which the through holes are angled.
Inventors:
SHIMOI Hideki (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
下井 英樹 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
下井 英樹 (〒58 静岡県浜松市東区市野町１１２６番地の１ 浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
Application Number:
JP2011/066349
Publication Date:
February 02, 2012
Filing Date:
July 19, 2011
Export Citation:
Assignee:
HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
SHIMOI Hideki (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
SHIMOI Hideki (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
International Classes:
H01L23/12; B23K26/00; B23K26/38; B23K26/40
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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Claims:
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