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Title:
METHOD FOR MANUFACTURING LIQUID MEDICINE AND DEVICE FOR MANUFACTURING LIQUID MEDICINE
Document Type and Number:
WIPO Patent Application WO/2018/142888
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a method for manufacturing a liquid medicine, the method being capable of manufacturing a liquid medicine excellent in suppressing the occurrence of defects. The method for manufacturing a liquid medicine of the present invention manufactures a liquid medicine containing an organic solvent by using a manufacturing apparatus, and comprises a step A for washing the production apparatus with a washing liquid and a step B for taking out the washing liquid from the manufacturing apparatus, and further comprises a preparation step for, after carrying out the step A and the step B, performing repeatedly the step A and the step B until the washing liquid taken out from the manufacturing apparatus satisfies the condition 1 below, and a production step for producing the liquid medicine in the manufacturing apparatus. Condition 1: after applying the washing liquid onto a substrate, variation in densities of particles having a particle diameter of 20 nm or less on the substrate before and after application of the washing liquid is 0.5 particles/cm2 or less.

Inventors:
KAMIMURA TETSUYA (JP)
Application Number:
PCT/JP2018/000741
Publication Date:
August 09, 2018
Filing Date:
January 15, 2018
Export Citation:
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Assignee:
FUJIFILM CORP (JP)
International Classes:
B08B3/08; H01L21/027; G03F7/004; G03F7/32
Foreign References:
JP2015049395A2015-03-16
JP2010169871A2010-08-05
JP2015197646A2015-11-09
JP2015072418A2015-04-16
JP2016073922A2016-05-12
JP2013092686A2013-05-16
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (JP)
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