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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING/REPRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/081133
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a magnetic recording medium which includes: a process for forming a magnetic layer (2) on at least one surface of a nonmagnetic substrate (1); a process for forming a mask layer (3) covering a surface of the magnetic layer (2); a process for forming a resist layer (4) on the mask layer (3); a process for patterning the front surface of the resist layer (4) into a form corresponding to a magnetic recording pattern; a process which uses the patterned resist layer (4) to pattern the mask layer (3); a process which uses the patterned mask layer (3) to partially remove the magnetic layer (2); and a process for removing the mask layer (3) together with the resist layer (4) from the magnetic layer (2). A reducing gas substantially not including oxygen, nitrogen, and halogen is used when the mask layer (3) and the resist layer (4) are removed by dry etching.

Inventors:
FUKUSHIMA MASATO (JP)
Application Number:
PCT/JP2010/073543
Publication Date:
July 07, 2011
Filing Date:
December 27, 2010
Export Citation:
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Assignee:
SHOWA DENKO KK (JP)
FUKUSHIMA MASATO (JP)
International Classes:
G11B5/84
Foreign References:
JP2008065944A2008-03-21
JP2008090881A2008-04-17
JP2009283076A2009-12-03
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
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